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Index of Semiconductor Process Gases - Sulfur Hexafluoride

SULFUR
HEXAFLUORIDE

M.W. [1]

146.056

N.B.P [2]

222.45 K

T.P [2]

223.15 K

SF6

Pc [2]

3.76 MPa

Tc [2]

318.7 K

Vc [3]

0.19582 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

MPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

1%/0.1%

1%

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

5.0%

0.5%

Reference

1,5

6

5

5

5

5

7

7

223

*9.17

0.23

-528.8

1190.2

-22326

450223

7.0

11.76

225

*9.25

0.25

-518.2

1164.6

-18470

413996

7.1

11.86

230

*9.43

0.31

-493.3

1104.5

-10258

335752

7.4

12.09

235

*9.61

0.37

-470.2

1049.6

-3741

272172

7.6

12.33

240

*9.79

0.45

-448.6

999.3

1426

220292

7.9

12.56

245

*9.97

0.54

-428.5

952.9

5517

177801

8.2

12.80

250

+10.09

0.64

-409.7

910.2

8747

142881

8.4

13.03

255

+10.26

0.75

-392.0

870.7

11283

114101

8.7

13.26

260

+10.43

0.88

-375.5

834.1

13261

90319

9.0

13.49

265

+10.60

1.02

-359.9

800.1

14789

70626

9.3

13.73

270

+10.76

1.18

-345.3

768.4

15952

54291

9.5

13.96

275

+10.92

1.36

-331.4

738.9

16820

40723

9.8

14.19

280

+11.08

1.55

-318.4

711.4

17449

29444

10.1

14.42

285

+11.23

1.77

-306.0

685.6

17885

20064

10.4

14.65

290

+11.38

2.00

-294.3

661.4

18164

12264

10.7

14.88

295

+11.53

2.26

-283.2

638.7

18317

5783

11.0

15.10

300

+11.68

2.53

-272.6

617.4

18368

404

11.3

15.33

305

+11.82

2.83

-262.6

597.3

18337

-4049

11.6

15.56

310

+11.96

3.16

-253.0

578.3

18240

-7727

11.9

15.78

315

+12.10

3.50

-243.9

560.4

18091

-10750

12.2

16.01

318.7

+12.20

3.77

-237.5

547.8

17955

-12628

12.4

16.18

320

+12.23

-

-235.2

543.5

17902

-13224

12.5

16.23

340

+12.74

-

-204.1

484.2

16896

-19136

13.6

17.12

360

+13.21

-

-177.9

435.6

15733

-21118

14.8

18.00

380

+13.64

-

-155.4

395.3

14585

-21099

16.0

18.87

400

+14.03

-

-136.1

361.3

13526

-20092

17.2

19.73

420

+14.38

-

-119.1

332.3

12580

-18635

18.3

20.57

440

+14.70

-

-104.3

307.3

11750

-17016

19.4

21.40

460

+14.99

-

-91.1

285.6

11030

-15390

20.5

22.22

480

+15.20

-

-79.4

266.6

10408

-13834

21.6

23.02

500

*15.44

-

-68.8

249.8

9873

-12386

22.6

23.81

550

*15.95

-

-46.7

215.4

8843

-9300

25.2

25.74

600

*16.37

-

-29.1

188.8

8141

-6925

27.7

27.59

650

*16.71

-

-14.9

167.7

7661

-5121

30.0

29.37

700

*16.99

-

-3.1

150.6

7334

-3752

32.3

31.08

750

*17.22

-

6.8

136.5

7112

-2709

34.4

32.73

800

17.42

-

15.2

124.6

6964

-1910

36.5

34.32

850

*17.58

-

22.4

114.5

6867

-1295

38.4

35.84

900

*17.73

-

28.7

105.8

6807

-819

-

-

950

*17.85

-

34.2

98.2

6773

-449

-

-

1000

*17.95

-

39.1

91.5

6758

-162

-

-

 

References:

  1. IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
  2. Horvath, A.L., "Physical Properties of Inorganic Compounds"; Crane Russak, New York (1975).
  3. Mathews, J.F., "The Critical Constants of Inorganic Substances", Chem. Rev.(72, 71, 1972).
  4. "JANAF Thermochemical Tables", J. Phys. Chem. Ref. Data (7, 793, 1978) (1978 Supplement).
  5. Hurly, J.J., Defibaugh, D.R., and Moldover, M.R., "Thermodynamic Properties of Sulfur Hexafluoride", Int. J. Thermophys. (21, 3, 2000).
  6. Verdelli, L.S., Miller, H.C., and Gall, J.F., "Some Physical Properties of Sulfur Hexafluoride"; Ind. Eng. Chem. (43, 1126, 1951).
  7. Strehlow, T. and Vogel, E., "Temperature Dependence and Initial Density Dependence of the Viscosity of Sulphur Hexafluoride", Physica A, (161, 101, 1989).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 31, 2009, Updated December 5, 2019