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Index of Semiconductor Process Gases - Sulfur Hexafluoride
|
SULFUR |
M.W. [1] 146.056 |
N.B.P [2] 222.45 K |
T.P [2] 223.55607(35) K |
|
SF6 |
Pc [2] 3.76 MPa |
Tc [2] 318.7 K |
Vc [3] 0.19582 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure MPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
1%/0.1% |
1% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
5.0% |
0.5% |
|||
|
Reference |
||||||||
|
223 |
*9.17 |
0.23 |
-528.8 |
1190.2 |
-22326 |
450223 |
7.0 |
11.76 |
|
225 |
*9.25 |
0.25 |
-518.2 |
1164.6 |
-18470 |
413996 |
7.1 |
11.86 |
|
230 |
*9.43 |
0.31 |
-493.3 |
1104.5 |
-10258 |
335752 |
7.4 |
12.09 |
|
235 |
*9.61 |
0.37 |
-470.2 |
1049.6 |
-3741 |
272172 |
7.6 |
12.33 |
|
240 |
*9.79 |
0.45 |
-448.6 |
999.3 |
1426 |
220292 |
7.9 |
12.56 |
|
245 |
*9.97 |
0.54 |
-428.5 |
952.9 |
5517 |
177801 |
8.2 |
12.80 |
|
250 |
+10.09 |
0.64 |
-409.7 |
910.2 |
8747 |
142881 |
8.4 |
13.03 |
|
255 |
+10.26 |
0.75 |
-392.0 |
870.7 |
11283 |
114101 |
8.7 |
13.26 |
|
260 |
+10.43 |
0.88 |
-375.5 |
834.1 |
13261 |
90319 |
9.0 |
13.49 |
|
265 |
+10.60 |
1.02 |
-359.9 |
800.1 |
14789 |
70626 |
9.3 |
13.73 |
|
270 |
+10.76 |
1.18 |
-345.3 |
768.4 |
15952 |
54291 |
9.5 |
13.96 |
|
275 |
+10.92 |
1.36 |
-331.4 |
738.9 |
16820 |
40723 |
9.8 |
14.19 |
|
280 |
+11.08 |
1.55 |
-318.4 |
711.4 |
17449 |
29444 |
10.1 |
14.42 |
|
285 |
+11.23 |
1.77 |
-306.0 |
685.6 |
17885 |
20064 |
10.4 |
14.65 |
|
290 |
+11.38 |
2.00 |
-294.3 |
661.4 |
18164 |
12264 |
10.7 |
14.88 |
|
295 |
+11.53 |
2.26 |
-283.2 |
638.7 |
18317 |
5783 |
11.0 |
15.10 |
|
300 |
+11.68 |
2.53 |
-272.6 |
617.4 |
18368 |
404 |
11.3 |
15.33 |
|
305 |
+11.82 |
2.83 |
-262.6 |
597.3 |
18337 |
-4049 |
11.6 |
15.56 |
|
310 |
+11.96 |
3.16 |
-253.0 |
578.3 |
18240 |
-7727 |
11.9 |
15.78 |
|
315 |
+12.10 |
3.50 |
-243.9 |
560.4 |
18091 |
-10750 |
12.2 |
16.01 |
|
318.7 |
+12.20 |
3.77 |
-237.5 |
547.8 |
17955 |
-12628 |
12.4 |
16.18 |
|
320 |
+12.23 |
- |
-235.2 |
543.5 |
17902 |
-13224 |
12.5 |
16.23 |
|
340 |
+12.74 |
- |
-204.1 |
484.2 |
16896 |
-19136 |
13.6 |
17.12 |
|
360 |
+13.21 |
- |
-177.9 |
435.6 |
15733 |
-21118 |
14.8 |
18.00 |
|
380 |
+13.64 |
- |
-155.4 |
395.3 |
14585 |
-21099 |
16.0 |
18.87 |
|
400 |
+14.03 |
- |
-136.1 |
361.3 |
13526 |
-20092 |
17.2 |
19.73 |
|
420 |
+14.38 |
- |
-119.1 |
332.3 |
12580 |
-18635 |
18.3 |
20.57 |
|
440 |
+14.70 |
- |
-104.3 |
307.3 |
11750 |
-17016 |
19.4 |
21.40 |
|
460 |
+14.99 |
- |
-91.1 |
285.6 |
11030 |
-15390 |
20.5 |
22.22 |
|
480 |
+15.20 |
- |
-79.4 |
266.6 |
10408 |
-13834 |
21.6 |
23.02 |
|
500 |
*15.44 |
- |
-68.8 |
249.8 |
9873 |
-12386 |
22.6 |
23.81 |
|
550 |
*15.95 |
- |
-46.7 |
215.4 |
8843 |
-9300 |
25.2 |
25.74 |
|
600 |
*16.37 |
- |
-29.1 |
188.8 |
8141 |
-6925 |
27.7 |
27.59 |
|
650 |
*16.71 |
- |
-14.9 |
167.7 |
7661 |
-5121 |
30.0 |
29.37 |
|
700 |
*16.99 |
- |
-3.1 |
150.6 |
7334 |
-3752 |
32.3 |
31.08 |
|
750 |
*17.22 |
- |
6.8 |
136.5 |
7112 |
-2709 |
34.4 |
32.73 |
|
800 |
17.42 |
- |
15.2 |
124.6 |
6964 |
-1910 |
36.5 |
34.32 |
|
850 |
*17.58 |
- |
22.4 |
114.5 |
6867 |
-1295 |
38.4 |
35.84 |
|
900 |
*17.73 |
- |
28.7 |
105.8 |
6807 |
-819 |
- |
- |
|
950 |
*17.85 |
- |
34.2 |
98.2 |
6773 |
-449 |
- |
- |
|
1000 |
*17.95 |
- |
39.1 |
91.5 |
6758 |
-162 |
- |
- |
References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
- Tew, W.L. and Quelhas, K.N., “Realizations of the Triple Point of Sulfur Hexafluoride in Transportable and Refillable Cells,” J Res NIST v123, 123013 (2018).
- Mathews, J.F., "The Critical Constants of Inorganic Substances", Chem. Rev.(72, 71, 1972).
- "JANAF Thermochemical Tables", J. Phys. Chem. Ref. Data (7, 793, 1978) (1978 Supplement).
- Hurly, J.J., Defibaugh, D.R., and Moldover, M.R., "Thermodynamic Properties of Sulfur Hexafluoride", Int. J. Thermophys. (21, 3, 2000).
- Verdelli, L.S., Miller, H.C., and Gall, J.F., "Some Physical Properties of Sulfur Hexafluoride"; Ind. Eng. Chem. (43, 1126, 1951).
- Strehlow, T. and Vogel, E., "Temperature Dependence and Initial Density Dependence of the Viscosity of Sulphur Hexafluoride", Physica A, (161, 101, 1989).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
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