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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

Ammonia	NH₃	Nitrous Oxide	N₂O
Argon	Ar	Nitrogen Trifluoride	NF₃
Allene	C₃H₄	Nitrogen	N₂
Arsenic Trifluoride	AsF₃	Oxygen	O₂
Arsine	AsH₃	Phosgene	COCl₂
Trimethyl Arsine	As(CH₃)₃	Phosphourous Trifluoride	PF₃
Diborane	B₂H₆	Phosphorous Pentafluoride	PF₅
Pentaborane	B₅H₉	Phosphine	PH₃
Boron Trichloride	BCl₃	Sulfur Dioxide	SO₂
Bromine	Br₂	Stibine	SbH₃
Carbon Dioxide	CO₂	Silane	SiH₄
Carbon Monoxide	CO	Disilane	Si₂H₆
Carbon Tetrafluoride	CF₄	Silicon Tetrachloride	SiCl₄
Chlorine	Cl₂	Silicon Tetrafluoride	SiF₄
Chlorine Trifluoride	ClF₃	Sulfur Hexafluoride	SF₆
Ethylene Oxide	C₂H₄O	Titanium Tetrachloride	TiCl₄
Helium	He	Tungsten Hexafluoride	WF₆
Hexafluoroethane	C₂F₆	Uranium Hexafluoride	UF₆
Hydrogen	H₂	Vinyl Bromide	C₂H₃Br
Hydrogen Bromide	HBr	Vinyl Fluoride	C₂H₃F
Hydrogen Chloride	HCl	Vinyl Chloride	C₂H₃Cl
Hydrogen Fluoride	HF	Trimethyl Gallium	Ga(CH₃)₃
Hydrogen Sulfide	H₂S	Triethyl Gallium	Ga(C₂H₅)₃
Molybdenum Hexafluoride	MoF₆	Trimethyl Indium	In(C₂H₅)₃
Nitric Oxide	NO