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Index of Semiconductor Process Gases
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
| Ammonia |
NH3 |
N2O |
|
| Argon |
Ar |
NF3 |
|
| Allene |
C3H4 |
N2 |
|
| Arsenic Trifluoride |
AsF3 |
O2 |
|
| Arsine |
AsH3 |
Phosgene |
COCl2 |
| Trimethyl Arsine |
As(CH3)3 |
Phosphourous Trifluoride |
PF3 |
| Diborane |
B2H6 |
Phosphorous Pentafluoride |
PF5 |
| Pentaborane |
B5H9 |
Phosphine |
PH3 |
| Boron Trichloride |
BCl3 |
SO2 |
|
| Bromine |
Br2 |
Stibine |
SbH3 |
| Carbon Dioxide |
CO2 |
Silane |
SiH4 |
| Carbon Monoxide |
CO |
Disilane |
Si2H6 |
| Carbon Tetrafluoride |
CF4 |
Silicon Tetrachloride |
SiCl4 |
| Chlorine |
Cl2 |
Silicon Tetrafluoride |
SiF4 |
| Chlorine Trifluoride |
ClF3 |
SF6 |
|
| Ethylene Oxide |
C2H4O |
Titanium Tetrachloride |
TiCl4 |
| Helium |
He |
WF6 |
|
| Hexafluoroethane |
C2F6 |
Uranium Hexafluoride |
UF6 |
| Hydrogen |
H2 |
Vinyl Bromide |
C2H3Br |
| Hydrogen Bromide |
HBr |
Vinyl Fluoride |
C2H3F |
| Hydrogen Chloride |
HCl |
Vinyl Chloride |
C2H3Cl |
| Hydrogen Fluoride |
HF |
Ga(CH3)3 |
|
| Hydrogen Sulfide |
H2S |
Triethyl Gallium |
Ga(C2H5)3 |
| Molybdenum Hexafluoride |
MoF6 |
Trimethyl Indium |
In(C2H5)3 |
| Nitric Oxide |
NO |
|
|
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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