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Index of Semiconductor Process Gases - Nitrogen Trifluoride

NITROGEN
TRIFLUORIDE

M.W. [1]

71.019

N.B.P [1]

144.14 K

T.P [1]

66.36 K

NF3

Pc [1]

4.4607 MPa

Tc [1]

234.00 K

Vc [1]

0.126263 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

MPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

+0.1%/*5%

-

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

-

+0.5%/-

Reference

1/2

-

1

1

1

1

1

1/3

200

+5.15

-

-200.3

401.9

4067

23719

#10.50

+11.70

210

+5.29

-

-181.6

367.7

5011

15370

#11.29

+12.28

220

+5.42

-

-165.2

338.5

5581

9444

#12.10

+12.84

230

+5.56

-

-150.7

313.2

5902

5206

#12.92

+13.40

240

+5.69

-

-137.8

291.2

6056

2163

#13.76

+13.95

250

+5.82

-

-126.3

271.9

6097

-26

#14.62

+14.49

260

+5.95

-

-116.0

254.7

6064

-1596

#15.48

+15.02

270

+6.08

-

-106.7

239.5

5982

-2714

#16.36

+15.56

280

+6.21

-

-98.2

225.9

5868

-3500

#17.24

+16.08

290

+6.33

-

-90.5

213.6

5735

-4040

#18.12

+16.60

300

+6.45

-

-83.5

202.6

5592

-4398

#19.02

+17.11

310

+6.57

-

-77.0

192.5

5443

-4619

#19.91

+17.62

320

+6.69

-

-71.0

183.4

5295

-4739

#20.80

+18.12

330

+6.80

-

-65.5

175.0

5148

-4784

#21.70

+18.62

340

+6.91

-

-60.4

167.4

5005

-4773

#22.59

+19.11

350

+7.02

-

-55.7

160.3

4868

-4720

#23.48

+19.59

360

+7.12

-

-51.2

153.8

4736

-4637

#24.37

+20.07

370

+7.22

-

-47.1

147.8

4610

-4532

#25.25

+20.60

380

+7.31

-

-43.2

142.2

4491

-4412

#26.13

+22.22

390

+7.40

-

-39.6

137.0

4378

-4282

#27.00

#22.70

400

+7.49

-

-36.2

132.1

4271

-4145

#27.87

#23.18

410

+7.56

-

-33.0

127.6

4170

-4005

#28.73

#23.65

420

+7.64

-

-30.0

123.3

4076

-3863

#29.59

#24.11

430

*7.674

-

-27.1

119.4

3986

-3722

#30.44

#24.57

440

*7.746

-

-24.4

115.6

3902

-3582

#31.28

#25.03

450

*7.815

-

-21.9

112.1

3823

-3444

#32.12

#25.48

460

*7.882

-

-19.4

108.8

3749

-3310

#32.95

#25.93

470

*7.946

-

-17.1

105.6

3679

-3179

#33.77

#26.37

480

*8.008

-

-15.0

102.7

3614

-3052

#34.59

#26.81

490

*8.068

-

-12.9

99.9

3552

-2929

#35.41

#27.25

500

*8.126

-

-10.9

97.2

3494

-2810

#36.21

#27.68

550

*8.396

-

-2.2

85.7

3252

-2281

#40.20

#29.77

600

*8.650

-

4.9

76.6

3073

-1849

#44.17

#31.79

650

*8.917

-

10.7

69.2

2939

-1500

#48.25

#33.73

700

*9.224

-

15.6

63.1

2839

-1217

#52.61

#35.59

750

*9.601

-

19.8

57.9

2763

-986

#57.46

#37.40

800

-

-

23.4

53.6

2705

-798

-

-

850

-

-

26.5

49.8

2662

-642

-

-

900

-

-

29.3

46.5

2629

-513

-

-

950

-

-

31.7

43.6

2604

-406

-

-

1000

-

-

33.9

41.1

2586

-316

-

-

References:

  1. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
  2. Hurly, J.J., Int. J. Thermophys. (23, 667, 2002).
  3. Hurly, J.J., "The Viscosity and Speed of Sound in Gaseous Nitrous Oxide and Nitrogen Trifluoride Measured with a Greenspan Viscometer", Int. J. Thermophys., (2004, v25, 625).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created February 19, 2010, Updated December 5, 2019