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Index of Semiconductor Process Gases - Nitrogen Trifluoride
|
NITROGEN |
M.W. [1] 71.019 |
N.B.P [1] 144.14 K |
T.P [1] 66.36 K |
|
NF3 |
Pc [1] 4.4607 MPa |
Tc [1] 234.00 K |
Vc [1] 0.126263 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure MPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
+0.1%/*5% |
- |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
- |
+0.5%/- |
|||
|
Reference |
- |
|||||||
|
200 |
+5.15 |
- |
-200.3 |
401.9 |
4067 |
23719 |
#10.50 |
+11.70 |
|
210 |
+5.29 |
- |
-181.6 |
367.7 |
5011 |
15370 |
#11.29 |
+12.28 |
|
220 |
+5.42 |
- |
-165.2 |
338.5 |
5581 |
9444 |
#12.10 |
+12.84 |
|
230 |
+5.56 |
- |
-150.7 |
313.2 |
5902 |
5206 |
#12.92 |
+13.40 |
|
240 |
+5.69 |
- |
-137.8 |
291.2 |
6056 |
2163 |
#13.76 |
+13.95 |
|
250 |
+5.82 |
- |
-126.3 |
271.9 |
6097 |
-26 |
#14.62 |
+14.49 |
|
260 |
+5.95 |
- |
-116.0 |
254.7 |
6064 |
-1596 |
#15.48 |
+15.02 |
|
270 |
+6.08 |
- |
-106.7 |
239.5 |
5982 |
-2714 |
#16.36 |
+15.56 |
|
280 |
+6.21 |
- |
-98.2 |
225.9 |
5868 |
-3500 |
#17.24 |
+16.08 |
|
290 |
+6.33 |
- |
-90.5 |
213.6 |
5735 |
-4040 |
#18.12 |
+16.60 |
|
300 |
+6.45 |
- |
-83.5 |
202.6 |
5592 |
-4398 |
#19.02 |
+17.11 |
|
310 |
+6.57 |
- |
-77.0 |
192.5 |
5443 |
-4619 |
#19.91 |
+17.62 |
|
320 |
+6.69 |
- |
-71.0 |
183.4 |
5295 |
-4739 |
#20.80 |
+18.12 |
|
330 |
+6.80 |
- |
-65.5 |
175.0 |
5148 |
-4784 |
#21.70 |
+18.62 |
|
340 |
+6.91 |
- |
-60.4 |
167.4 |
5005 |
-4773 |
#22.59 |
+19.11 |
|
350 |
+7.02 |
- |
-55.7 |
160.3 |
4868 |
-4720 |
#23.48 |
+19.59 |
|
360 |
+7.12 |
- |
-51.2 |
153.8 |
4736 |
-4637 |
#24.37 |
+20.07 |
|
370 |
+7.22 |
- |
-47.1 |
147.8 |
4610 |
-4532 |
#25.25 |
+20.60 |
|
380 |
+7.31 |
- |
-43.2 |
142.2 |
4491 |
-4412 |
#26.13 |
+22.22 |
|
390 |
+7.40 |
- |
-39.6 |
137.0 |
4378 |
-4282 |
#27.00 |
#22.70 |
|
400 |
+7.49 |
- |
-36.2 |
132.1 |
4271 |
-4145 |
#27.87 |
#23.18 |
|
410 |
+7.56 |
- |
-33.0 |
127.6 |
4170 |
-4005 |
#28.73 |
#23.65 |
|
420 |
+7.64 |
- |
-30.0 |
123.3 |
4076 |
-3863 |
#29.59 |
#24.11 |
|
430 |
*7.674 |
- |
-27.1 |
119.4 |
3986 |
-3722 |
#30.44 |
#24.57 |
|
440 |
*7.746 |
- |
-24.4 |
115.6 |
3902 |
-3582 |
#31.28 |
#25.03 |
|
450 |
*7.815 |
- |
-21.9 |
112.1 |
3823 |
-3444 |
#32.12 |
#25.48 |
|
460 |
*7.882 |
- |
-19.4 |
108.8 |
3749 |
-3310 |
#32.95 |
#25.93 |
|
470 |
*7.946 |
- |
-17.1 |
105.6 |
3679 |
-3179 |
#33.77 |
#26.37 |
|
480 |
*8.008 |
- |
-15.0 |
102.7 |
3614 |
-3052 |
#34.59 |
#26.81 |
|
490 |
*8.068 |
- |
-12.9 |
99.9 |
3552 |
-2929 |
#35.41 |
#27.25 |
|
500 |
*8.126 |
- |
-10.9 |
97.2 |
3494 |
-2810 |
#36.21 |
#27.68 |
|
550 |
*8.396 |
- |
-2.2 |
85.7 |
3252 |
-2281 |
#40.20 |
#29.77 |
|
600 |
*8.650 |
- |
4.9 |
76.6 |
3073 |
-1849 |
#44.17 |
#31.79 |
|
650 |
*8.917 |
- |
10.7 |
69.2 |
2939 |
-1500 |
#48.25 |
#33.73 |
|
700 |
*9.224 |
- |
15.6 |
63.1 |
2839 |
-1217 |
#52.61 |
#35.59 |
|
750 |
*9.601 |
- |
19.8 |
57.9 |
2763 |
-986 |
#57.46 |
#37.40 |
|
800 |
- |
- |
23.4 |
53.6 |
2705 |
-798 |
- |
- |
|
850 |
- |
- |
26.5 |
49.8 |
2662 |
-642 |
- |
- |
|
900 |
- |
- |
29.3 |
46.5 |
2629 |
-513 |
- |
- |
|
950 |
- |
- |
31.7 |
43.6 |
2604 |
-406 |
- |
- |
|
1000 |
- |
- |
33.9 |
41.1 |
2586 |
-316 |
- |
- |
References:
- Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
- Hurly, J.J., Int. J. Thermophys. (23, 667, 2002).
- Hurly, J.J., "The Viscosity and Speed of Sound in Gaseous Nitrous Oxide and Nitrogen Trifluoride Measured with a Greenspan Viscometer", Int. J. Thermophys., (2004, v25, 625).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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-
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