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Index of Semiconductor Process Gases - Trimethyl Gallium

TRIMETHYL
GALLIUM

M.W. [1]

114.827

N.B.P [2]

328.95 K

T.P [2]

257.45 K

Ga(CH3)3

Pc [3]

4.04 MPa

Tc [3]

510 K

Vc [3]

0.211 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Esti-
mated
Un-
certainty

*1%/0.1%

5%

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

#10%

#10%

Ref-
erence

*4,3

5

3

3

3

3

3

3

200

*10.98

0.02

-7290.0

33.926

-155.951

1939.733

#12.79

#14.41

210

*11.15

0.07

-5839.0

25.958

-85.687

1038.433

#13.50

#14.99

220

*11.34

0.19

-4769.1

20.307

-49.056

582.205

#14.22

#15.56

230

*11.56

0.45

-3961.7

16.197

-29.071

339.606

#15.00

#16.12

240

*11.78

0.99

-3340.1

13.141

-17.733

204.963

#15.79

#16.68

250

*12.03

2.04

-2852.7

10.823

-11.078

127.389

#16.62

#17.24

260

*12.28

3.93

-2464.6

9.034

-7.057

81.208

#17.48

#17.79

270

*12.54

7.15

-2151.0

7.632

-4.565

52.910

#18.37

#18.34

280

*12.81

12.37

-1894.3

6.516

-2.987

35.123

#19.29

#18.88

290

*13.08

20.45

-1681.9

5.618

-1.968

23.689

#20.20

#19.42

300

*13.35

32.48

-1504.2

4.886

-1.300

16.191

#21.18

#19.96

310

*13.63

49.75

-1354.1

4.283

-0.856

11.186

#22.18

#20.49

320

*13.91

73.76

-1226.3

3.782

-0.558

7.794

#23.16

#21.02

330

*14.18

106.19

-1116.5

3.362

-0.356

5.463

#24.20

#21.56

340

+14.29

148.86

-1021.5

3.006

-0.219

3.842

#25.22

#22.09

350

+14.50

203.71

-938.9

2.703

-0.125

2.703

#26.25

#22.61

360

+14.77

272.72

-866.5

2.443

-0.061

1.896

#27.34

#23.14

370

+15.08

357.91

-802.7

2.219

-0.017

1.320

#28.41

#23.67

380

+15.41

461.21

-746.2

2.024

0.013

0.907

#29.48

#24.20

390

+15.74

584.49

-695.8

1.853

0.032

0.610

#30.61

#24.72

400

+16.04

729.47

-650.9

1.703

0.045

0.395

#31.71

#25.25

410

+16.31

897.71

-610.5

1.571

0.052

0.240

#32.82

#25.77

420

+16.52

1090.56

-574.0

1.454

0.057

0.128

#33.93

#26.30

430

*16.74

1309.14

-541.1

1.350

0.059

0.048

#35.11

#26.83

440

*16.97

1554.34

-511.1

1.256

0.059

-0.008

#36.24

#27.36

450

*17.20

1826.79

-483.8

1.173

0.059

-0.048

#37.38

#27.89

460

*17.42

2126.88

-458.9

1.097

0.057

-0.075

#38.59

#28.41

470

*17.64

2454.76

-436.0

1.029

0.055

-0.092

#39.75

#28.94

480

*17.86

2810.33

-415.0

0.968

0.053

-0.103

#40.92

#29.48

490

*18.07

3193.30

-395.7

0.912

0.051

-0.109

#42.15

#30.01

500

*18.28

3603.16

-377.8

0.860

0.049

-0.111

#43.33

#30.54

550

*19.27

-

-305.7

0.662

0.039

-0.094

#49.55

#33.23

600

*20.20

-

-254.2

0.528

0.032

-0.065

#56.03

#35.95

650

*21.08

-

-215.9

0.433

0.028

-0.039

#62.78

#38.70

700

*21.90

-

-186.5

0.363

0.026

-0.020

#69.73

#41.47

750

*22.67

-

-163.3

0.311

0.025

-0.005

#76.91

#44.27

800

*23.40

-

-144.6

0.270

0.025

0.005

#84.31

#47.10

850

*24.08

-

-129.3

0.237

0.025

0.012

#91.77

#49.92

900

*24.72

-

-116.5

0.211

0.026

0.018

#99.48

#52.76

950

*25.32

-

-105.7

0.190

0.027

0.021

#107.21

#55.61

1000

*25.87

-

-96.4

0.172

0.029

0.024

#115.01

#58.46


References:

  1. IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data 1995, 24, 1561.
  2. "Trimethylgallium"; Material Safety Data Sheet; Solkatronic Chemicals, Inc., Fairfield, NJ, 1982.
  3. Hurly, J.J., "Thermophysical Properties of Nitrogen Trifluoride, Ethylene Oxide, and Trimethyl Gallium, from Speed-of-Sound Measurements", Int. J. Thermophys., In Press.
  4. Shaulov, Y.K.; Mosin, A.M.; Russ. J. Phys. Chem. (50, 319, 1976).
  5. Sackman, J.F.; Long, L.H.; Trans. Faraday Soc. (54, 1797, 1958).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 31, 2009, Updated November 26, 2019