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Index of Semiconductor Process Gases - Ammonia

AMMONIA

M.W. [1]

17.030

N.B.P. [1]

239.82 K

T.P. [1]

195.5K

NH3

Pc [1]

11.333 MPa

Tc [1]

405.4K

Vc [1]

0.07569 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

$$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

MPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

2%

0.2%

Densities calculated should be good to 0.5% away from coexistence curve.

1%

3%

Reference

1

-

1

1

1

1

1

1

200

4.114

0.0087

-1028.60

4285.60

-584290.0

-

19.67

6.96

210

4.118

0.0177

-843.29

3354.75

-439050.0

-

19.83

7.23

220

4.127

0.338

-703.65

2678.06

-301310.0

-

20.08

7.52

230

4.139

0.604

-596.21

2176.21

-197260.0

-

20.41

7.82

240

4.153

0.1022

-511.97

1796.88

-125070.0

-

20.83

8.13

250

4.171

0.1649

-444.79

1505.20

-76986.0

-

21.33

8.45

260

4.191

0.2553

-390.37

1277.43

-45675.0

-

21.91

8.78

270

4.213

0.3811

-345.67

1096.93

-25596.0

-

22.57

9.12

280

4.238

0.5509

-308.49

952.03

-12886.0

-

23.30

9.47

290

4.264

0.7744

-277.21

834.21

-4958.4

-

24.11

9.83

300

4.292

1.0617

-250.61

737.37

-111.8

-

24.99

10.19

310

4.321

1.4240

-227.78

656.92

2761.2

-

25.94

10.55

320

4.353

1.8728

-208.02

589.44

4377.9

-

26.95

10.92

330

4.385

2.4205

-190.78

532.32

5201.9

-

28.03

11.30

340

4.419

3.0802

-175.63

483.58

5532.2

-

29.17

11.67

350

4.453

3.8660

-162.23

441.67

5561.4

-

30.37

12.05

360

4.489

4.7929

-150.31

405.32

5412.9

-

31.62

12.43

370

4.526

5.8778

-139.65

373.66

5165.5

-

32.93

12.82

380

4.564

7.1402

-130.06

345.86

4869.1

-

34.29

13.20

390

4.603

8.6045

-121.40

321.32

4554.7

-

35.69

13.59

400

4.643

10.3050

-113.55

299.54

4241.1

-

37.13

13.98

410

4.683

-

-106.39

280.11

3939.6

-

38.61

14.37

420

4.724

-

-99.86

262.70

3656.0

-

40.13

14.75

430

4.766

-

-93.86

247.02

3393.4

-

41.68

15.14

440

4.808

-

-88.35

232.85

3152.6

-

43.26

15.53

450

4.851

-

-83.26

220.00

2933.3

-

44.85

15.92

460

4.894

-

-78.56

208.28

2734.5

-

46.47

16.31

470

4.938

-

-74.19

197.58

2554.9

-

48.11

16.70

480

4.982

-

-70.14

187.77

2393.0

-

49.75

17.09

490

5.026

-

-66.36

178.74

2247.1

-

51.40

17.48

500

5.071

-

-62.83

170.42

2115.8

-

53.05

17.86

550

5.301

-

-48.25

137.02

1631.4

-

61.16

19.78

600

5.535

-

-37.41

113.18

1341.7

-

68.55

21.68

650

5.773

-

-29.08

95.39

1165.0

-

74.51

23.55

700

6.011

-

-22.54

81.68

1055.7

-

78.26

25.39

750

6.249

-

-17.29

70.81

987.8

-

78.96

27.20

800

6.484

-

-13.01

62.00

946.3

-

75.67

29.00

850

6.716

-

-9.47

54.74

922.1

-

67.41

30.79

900

-

-

-

-

-

-

-

-

950

-

-

-

-

-

-

-

-

1000

-

-

-

-

-

-

-

-

 

References:

 

  1. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

 

Footnote:

is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 16, 2009, Updated December 5, 2019