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Index of Semiconductor Process Gases - Carbon Tetrafluoride
|
CARBON |
M.W. [1] 88.0046 |
N.B.P [2] 145.09 K |
T.P [3] 89.56 K |
|
CF4 |
Pc [2] 3.74 MPa |
Tc [2] 227.5 K |
Vc [2] 0.14066 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure MPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
1%/0.1% |
1% |
Gas densitities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
5% |
*5%/+0.5% |
|||
|
Reference |
||||||||
|
150 |
*4.81 |
0.14 |
-421.4 |
922.9 |
-24832 |
331231 |
4.9 |
*9.2 |
|
155 |
*4.90 |
0.19 |
-392.3 |
853.3 |
-15389 |
248458 |
5.2 |
*9.5 |
|
160 |
*4.98 |
0.26 |
-366.2 |
792.3 |
-8518 |
187002 |
5.5 |
*9.8 |
|
165 |
*5.07 |
0.34 |
-342.7 |
738.4 |
-3503 |
140922 |
5.8 |
*10.1 |
|
170 |
*5.16 |
0.44 |
-321.4 |
690.6 |
163 |
106070 |
6.1 |
*10.4 |
|
175 |
*5.25 |
0.56 |
-302.0 |
648.0 |
2837 |
79513 |
6.5 |
*10.7 |
|
180 |
*5.34 |
0.70 |
-284.3 |
609.7 |
4779 |
59144 |
6.8 |
*11.0 |
|
185 |
*5.43 |
0.86 |
-268.0 |
575.3 |
6176 |
43436 |
7.1 |
*11.3 |
|
190 |
*5.52 |
1.06 |
-253.1 |
544.2 |
7166 |
31270 |
7.5 |
*11.6 |
|
195 |
*5.61 |
1.28 |
-239.4 |
516.0 |
7851 |
21814 |
7.8 |
*11.9 |
|
200 |
*5.70 |
1.54 |
-226.6 |
490.3 |
8307 |
14448 |
8.2 |
*12.6 |
|
205 |
*5.79 |
1.84 |
-214.8 |
466.7 |
8590 |
8702 |
8.6 |
*12.9 |
|
210 |
*5.88 |
2.17 |
-203.8 |
445.2 |
8743 |
4221 |
8.9 |
+13.2 |
|
215 |
*5.97 |
2.56 |
-193.6 |
425.3 |
8800 |
730 |
9.3 |
+13.4 |
|
220 |
+6.06 |
2.99 |
-184.0 |
407.0 |
8785 |
-1980 |
9.7 |
+13.6 |
|
225 |
+6.15 |
3.48 |
-175.1 |
390.1 |
8716 |
-4073 |
10.0 |
+13.7 |
|
227 |
+6.18 |
3.70 |
-171.6 |
383.7 |
8676 |
-4767 |
10.2 |
+14.0 |
|
230 |
+6.23 |
- |
-166.7 |
374.5 |
8608 |
-5677 |
10.4 |
+14.2 |
|
235 |
+6.32 |
- |
-158.8 |
359.9 |
8472 |
-6892 |
10.8 |
+14.5 |
|
240 |
+6.41 |
- |
-151.3 |
346.3 |
8317 |
-7798 |
11.2 |
+14.8 |
|
245 |
+6.49 |
- |
-144.3 |
333.7 |
8149 |
-8456 |
11.6 |
+15.0 |
|
250 |
+6.58 |
- |
-137.7 |
321.8 |
7973 |
-8916 |
12.0 |
+15.3 |
|
255 |
+6.66 |
- |
-131.4 |
310.7 |
7793 |
-9219 |
12.4 |
+15.5 |
|
260 |
+6.74 |
- |
-125.5 |
300.3 |
7612 |
-9397 |
12.8 |
+15.8 |
|
265 |
+6.82 |
- |
-119.9 |
290.5 |
7433 |
-9474 |
13.2 |
+16.0 |
|
270 |
+6.91 |
- |
-114.5 |
281.3 |
7255 |
-9473 |
13.6 |
+16.3 |
|
275 |
+6.99 |
- |
-109.5 |
272.6 |
7082 |
-9408 |
14.0 |
+16.6 |
|
280 |
+7.06 |
- |
-104.6 |
264.4 |
6914 |
-9294 |
14.4 |
+16.8 |
|
285 |
+7.14 |
- |
-100.0 |
256.7 |
6750 |
-9142 |
14.8 |
+17.1 |
|
290 |
+7.22 |
- |
-95.6 |
249.3 |
6593 |
-8961 |
15.2 |
+17.3 |
|
295 |
+7.30 |
- |
-91.4 |
242.4 |
6441 |
-8757 |
15.6 |
+17.6 |
|
300 |
+7.37 |
- |
-87.4 |
235.7 |
6296 |
-8537 |
16.0 |
+17.8 |
|
305 |
+7.45 |
- |
-83.5 |
229.5 |
6157 |
-8306 |
16.4 |
+18.0 |
|
310 |
+7.52 |
- |
-79.9 |
223.5 |
6024 |
-8066 |
16.8 |
+18.2 |
|
315 |
+7.59 |
- |
-76.3 |
217.8 |
5897 |
-7822 |
17.2 |
+18.3 |
|
318.7 |
+7.65 |
- |
-73.8 |
213.7 |
5806 |
-7640 |
17.5 |
+19.3 |
|
320 |
+7.67 |
- |
-72.9 |
212.3 |
5775 |
-7576 |
17.6 |
+20.2 |
|
340 |
+7.95 |
- |
-60.7 |
192.9 |
5345 |
-6604 |
19.3 |
+21.1 |
|
360 |
+8.21 |
- |
-50.1 |
176.5 |
4994 |
-5700 |
20.9 |
*20.4 |
|
380 |
+8.47 |
- |
-41.0 |
162.6 |
4708 |
-4891 |
22.6 |
*21.3 |
|
400 |
+8.71 |
- |
-32.9 |
150.5 |
4475 |
-4181 |
24.3 |
*22.2 |
|
420 |
+8.93 |
- |
-25.9 |
140.1 |
4287 |
-3566 |
25.9 |
*23.0 |
|
440 |
+9.14 |
- |
-19.6 |
130.9 |
4133 |
-3034 |
27.6 |
*23.9 |
|
460 |
+9.34 |
- |
-13.9 |
122.7 |
4009 |
-2576 |
29.2 |
*24.7 |
|
480 |
*9.54 |
- |
-8.9 |
115.5 |
3908 |
-2181 |
30.8 |
*25.6 |
|
500 |
*9.72 |
- |
-4.3 |
109.0 |
3826 |
-1842 |
32.4 |
*26.4 |
|
550 |
*10.11 |
- |
5.5 |
95.4 |
3683 |
-1183 |
36.3 |
*28.3 |
|
600 |
*10.45 |
- |
13.3 |
84.6 |
3601 |
-724 |
40.1 |
*30.2 |
|
650 |
*10.74 |
- |
19.7 |
75.8 |
3557 |
-403 |
43.8 |
*32.1 |
|
700 |
*10.98 |
- |
25.0 |
68.5 |
3535 |
-177 |
47.4 |
*33.8 |
|
750 |
*11.19 |
- |
29.5 |
62.4 |
3529 |
-18 |
50.8 |
*35.5 |
|
800 |
*11.37 |
- |
33.4 |
57.2 |
3532 |
93 |
54.2 |
*37.1 |
|
850 |
*11.53 |
- |
36.7 |
52.7 |
3540 |
170 |
57.4 |
*38.7 |
|
900 |
*11.66 |
- |
39.6 |
48.8 |
3551 |
222 |
60.5 |
*40.3 |
|
950 |
*11.78 |
- |
42.2 |
45.3 |
3564 |
256 |
663.5 |
*41.8 |
|
1000 |
*11.88 |
- |
44.4 |
42.3 |
3578 |
275 |
66.4 |
*43.3 |
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
- Stavely, L.A., "Lobo, L.Q., "Thermodynamic Properties of Liquid Carbon Tetrafluoride," J. Chem. Eng. Data, (1981, 26, 404).
- Chase, M., "JANAF Thermochemical Table, 3rd Edition," J. Phys. Chem. Ref. Data (198, 14) Supplement #1.
- Hurly, J.J., "Thermophysical Properties of Gaseous CF4 and C2F6 from Speed-of-Sound Measurements, Int. J. Thermophys. (1999, 20, 455).
- Uribe, F.J., Mason, E.A., Kestin, J., "Thermal Conductivity of Nine Polyatomic Gases at Low Density", J. Phys. Chem. Ref. Data (1990, 19, 1123).
- "Thermophysical Properties of Matter", IFI/Plenum, New York, (1970. 13 Vols.); J. M. Hellemans, "The Viscosity of CH4, CF4, and SF6 Over a Range of Temperatures", Physica (1973, 65, 376).
- Hurly, J.J., Gillis, K.A., Mehl, J.B., and Moldover, M.R., "The Viscosity of Seven Gases Measured with a Greenspan Viscometer," Int. J. Thermophys. (2003, Vol 24/6).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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