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Index of Semiconductor Process Gases - Carbon Tetrafluoride

CARBON
TETRAFLUORIDE

M.W. [1]

88.0046

N.B.P [2]

145.09 K

T.P [3]

89.56 K

CF4

Pc [2]

3.74 MPa

Tc [2]

227.5 K

Vc [2]

0.14066 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

MPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

1%/0.1%

1%

Gas densitities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

5%

*5%/+0.5%

Reference

*4/+5

3

5

5

5

5

6

*7/+8

150

*4.81

0.14

-421.4

922.9

-24832

331231

4.9

*9.2

155

*4.90

0.19

-392.3

853.3

-15389

248458

5.2

*9.5

160

*4.98

0.26

-366.2

792.3

-8518

187002

5.5

*9.8

165

*5.07

0.34

-342.7

738.4

-3503

140922

5.8

*10.1

170

*5.16

0.44

-321.4

690.6

163

106070

6.1

*10.4

175

*5.25

0.56

-302.0

648.0

2837

79513

6.5

*10.7

180

*5.34

0.70

-284.3

609.7

4779

59144

6.8

*11.0

185

*5.43

0.86

-268.0

575.3

6176

43436

7.1

*11.3

190

*5.52

1.06

-253.1

544.2

7166

31270

7.5

*11.6

195

*5.61

1.28

-239.4

516.0

7851

21814

7.8

*11.9

200

*5.70

1.54

-226.6

490.3

8307

14448

8.2

*12.6

205

*5.79

1.84

-214.8

466.7

8590

8702

8.6

*12.9

210

*5.88

2.17

-203.8

445.2

8743

4221

8.9

+13.2

215

*5.97

2.56

-193.6

425.3

8800

730

9.3

+13.4

220

+6.06

2.99

-184.0

407.0

8785

-1980

9.7

+13.6

225

+6.15

3.48

-175.1

390.1

8716

-4073

10.0

+13.7

227

+6.18

3.70

-171.6

383.7

8676

-4767

10.2

+14.0

230

+6.23

-

-166.7

374.5

8608

-5677

10.4

+14.2

235

+6.32

-

-158.8

359.9

8472

-6892

10.8

+14.5

240

+6.41

-

-151.3

346.3

8317

-7798

11.2

+14.8

245

+6.49

-

-144.3

333.7

8149

-8456

11.6

+15.0

250

+6.58

-

-137.7

321.8

7973

-8916

12.0

+15.3

255

+6.66

-

-131.4

310.7

7793

-9219

12.4

+15.5

260

+6.74

-

-125.5

300.3

7612

-9397

12.8

+15.8

265

+6.82

-

-119.9

290.5

7433

-9474

13.2

+16.0

270

+6.91

-

-114.5

281.3

7255

-9473

13.6

+16.3

275

+6.99

-

-109.5

272.6

7082

-9408

14.0

+16.6

280

+7.06

-

-104.6

264.4

6914

-9294

14.4

+16.8

285

+7.14

-

-100.0

256.7

6750

-9142

14.8

+17.1

290

+7.22

-

-95.6

249.3

6593

-8961

15.2

+17.3

295

+7.30

-

-91.4

242.4

6441

-8757

15.6

+17.6

300

+7.37

-

-87.4

235.7

6296

-8537

16.0

+17.8

305

+7.45

-

-83.5

229.5

6157

-8306

16.4

+18.0

310

+7.52

-

-79.9

223.5

6024

-8066

16.8

+18.2

315

+7.59

-

-76.3

217.8

5897

-7822

17.2

+18.3

318.7

+7.65

-

-73.8

213.7

5806

-7640

17.5

+19.3

320

+7.67

-

-72.9

212.3

5775

-7576

17.6

+20.2

340

+7.95

-

-60.7

192.9

5345

-6604

19.3

+21.1

360

+8.21

-

-50.1

176.5

4994

-5700

20.9

*20.4

380

+8.47

-

-41.0

162.6

4708

-4891

22.6

*21.3

400

+8.71

-

-32.9

150.5

4475

-4181

24.3

*22.2

420

+8.93

-

-25.9

140.1

4287

-3566

25.9

*23.0

440

+9.14

-

-19.6

130.9

4133

-3034

27.6

*23.9

460

+9.34

-

-13.9

122.7

4009

-2576

29.2

*24.7

480

*9.54

-

-8.9

115.5

3908

-2181

30.8

*25.6

500

*9.72

-

-4.3

109.0

3826

-1842

32.4

*26.4

550

*10.11

-

5.5

95.4

3683

-1183

36.3

*28.3

600

*10.45

-

13.3

84.6

3601

-724

40.1

*30.2

650

*10.74

-

19.7

75.8

3557

-403

43.8

*32.1

700

*10.98

-

25.0

68.5

3535

-177

47.4

*33.8

750

*11.19

-

29.5

62.4

3529

-18

50.8

*35.5

800

*11.37

-

33.4

57.2

3532

93

54.2

*37.1

850

*11.53

-

36.7

52.7

3540

170

57.4

*38.7

900

*11.66

-

39.6

48.8

3551

222

60.5

*40.3

950

*11.78

-

42.2

45.3

3564

256

663.5

*41.8

1000

*11.88

-

44.4

42.3

3578

275

66.4

*43.3

References:

  1. IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
  2. "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
  3. Stavely, L.A., "Lobo, L.Q., "Thermodynamic Properties of Liquid Carbon Tetrafluoride," J. Chem. Eng. Data, (1981, 26, 404).
  4. Chase, M., "JANAF Thermochemical Table, 3rd Edition," J. Phys. Chem. Ref. Data (198, 14) Supplement #1.
  5. Hurly, J.J., "Thermophysical Properties of Gaseous CF4 and C2F6 from Speed-of-Sound Measurements, Int. J. Thermophys. (1999, 20, 455).
  6. Uribe, F.J., Mason, E.A., Kestin, J., "Thermal Conductivity of Nine Polyatomic Gases at Low Density", J. Phys. Chem. Ref. Data (1990, 19, 1123).
  7. "Thermophysical Properties of Matter", IFI/Plenum, New York, (1970. 13 Vols.); J. M. Hellemans, "The Viscosity of CH4, CF4, and SF6 Over a Range of Temperatures", Physica (1973, 65, 376).
  8. Hurly, J.J., Gillis, K.A., Mehl, J.B., and Moldover, M.R., "The Viscosity of Seven Gases Measured with a Greenspan Viscometer," Int. J. Thermophys. (2003, Vol 24/6).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 23, 2009, Updated December 5, 2019