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Index of Semiconductor Process Gases - Chlorine
|
CHLORINE |
M.W. [1] 70.9054 |
N.B.P [2] 239.12 K |
T.P [2] 172.12 K |
|
Cl2 |
Pc [3] 7.71 MPa |
Tc [3] 417.15 K |
Vc [3] 0.124 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
1% |
1% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
5% |
5% |
|||
|
Reference |
||||||||
|
240 |
3.94 |
105.14 |
-457.65 |
990.9 |
-53928 |
548995 |
16.8 |
10.8 |
|
250 |
3.97 |
159.80 |
-419.2 |
893.9 |
-34941 |
390113 |
17.3 |
11.2 |
|
260 |
4.00 |
234.33 |
-385.8 |
812.1 |
-21911 |
280192 |
17.8 |
11.7 |
|
270 |
4.03 |
333.02 |
-356.5 |
742.2 |
-12871 |
202823 |
18.3 |
12.2 |
|
280 |
4.05 |
460.43 |
-330.6 |
682.2 |
-6549 |
147542 |
18.7 |
12.6 |
|
290 |
4.07 |
621.30 |
-307.6 |
630.1 |
-2106 |
107524 |
19.2 |
13.1 |
|
300 |
4.09 |
820.54 |
-287.0 |
584.5 |
1020 |
78223 |
19.7 |
13.5 |
|
310 |
4.11 |
1063.14 |
-268.5 |
544.5 |
3214 |
56561 |
20.1 |
14.0 |
|
320 |
4.13 |
1354.20 |
-251.8 |
509.1 |
4742 |
40412 |
20.5 |
14.4 |
|
330 |
4.15 |
1698.86 |
-236.6 |
477.5 |
5791 |
28292 |
21.0 |
14.8 |
|
340 |
4.16 |
2102.36 |
-222.8 |
449.3 |
6494 |
19146 |
21.4 |
15.3 |
|
350 |
4.18 |
2569.99 |
-210.1 |
423.9 |
6944 |
12216 |
21.8 |
15.7 |
|
360 |
4.19 |
3107.13 |
-198.5 |
401.0 |
7211 |
6853 |
22.2 |
16.1 |
|
370 |
4.21 |
3719.29 |
-187.8 |
380.3 |
7345 |
2951 |
22.6 |
16.6 |
|
380 |
4.22 |
4412.14 |
-177.9 |
361.4 |
7381 |
-88 |
23.0 |
17.0 |
|
390 |
4.23 |
5191.52 |
-168.8 |
344.1 |
7348 |
-2390 |
23.4 |
17.4 |
|
400 |
4.24 |
6063.50 |
-160.3 |
328.3 |
7264 |
-4123 |
23.8 |
17.8 |
|
410 |
4.26 |
7034.44 |
-152.3 |
313.8 |
7146 |
-5415 |
24.2 |
18.2 |
|
420 |
4.27 |
- |
-144.9 |
300.4 |
7003 |
-6365 |
24.6 |
18.7 |
|
430 |
4.28 |
- |
-138.0 |
288.0 |
6845 |
-7049 |
24.9 |
19.1 |
|
440 |
4.28 |
- |
-131.5 |
276.6 |
6677 |
-7526 |
25.3 |
19.5 |
|
450 |
4.29 |
- |
-125.4 |
265.9 |
6504 |
-7839 |
25.7 |
19.9 |
|
460 |
4.30 |
- |
-119.7 |
256.0 |
6330 |
-8027 |
26.0 |
20.3 |
|
470 |
4.31 |
- |
-114.3 |
246.7 |
6156 |
-8115 |
26.4 |
20.7 |
|
480 |
4.32 |
- |
-109.2 |
238.0 |
5985 |
-8127 |
26.7 |
21.1 |
|
490 |
4.33 |
- |
-104.4 |
229.9 |
5818 |
-8079 |
27.1 |
21.5 |
|
500 |
4.33 |
- |
-99.8 |
222.3 |
5655 |
-7985 |
27.4 |
21.9 |
|
550 |
4.37 |
- |
-80.2 |
190.4 |
4930 |
-7146 |
29.1 |
23.9 |
|
600 |
4.39 |
- |
-64.7 |
166.0 |
4352 |
-6123 |
30.8 |
25.8 |
|
650 |
4.42 |
- |
-52.2 |
146.9 |
3901 |
-5165 |
32.3 |
27.7 |
|
700 |
4.44 |
- |
-41.9 |
131.5 |
3549 |
-4337 |
33.8 |
29.5 |
|
750 |
4.45 |
- |
-33.3 |
118.9 |
3274 |
-3643 |
35.2 |
31.3 |
|
800 |
4.47 |
- |
-26.0 |
108.4 |
3058 |
-3068 |
36.6 |
33.1 |
|
850 |
4.48 |
- |
-19.7 |
99.4 |
2887 |
-2593 |
38.0 |
34.8 |
|
900 |
4.49 |
- |
-14.2 |
91.8 |
2750 |
-2201 |
39.3 |
36.6 |
|
950 |
4.50 |
- |
-9.4 |
85.2 |
2640 |
-1876 |
40.6 |
38.2 |
|
1000 |
4.51 |
- |
-5.2 |
79.4 |
2551 |
-1606 |
41.9 |
39.9 |
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds", Data Project; Thermodynamics Research Center, Texas A&M University, College Station, Texas (1980-extant. loose-leaf data sheets).
- Mathews, J.F., "The Critical Constants of Inorganic Substances", Chem. Rev. (1972, 72, 71).
- Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517.)
- Hurly, J.J., unpublished results
- Powell, R.W., Liley, P.E., Ho, C.Y., "Thermal Conductivity of the Elements", J. Phys. Chem. Ref. Data (1972, 1, 279).
- Laby, T.H., Kaye, G.W.C., "Tables of Physical and Chemical Constants, 14th ed.", Longman Group, Limited, London (1973).
- Matheson Gas Data Book, unabridged ed., Matheson Company, Inc. East Rutherford, NJ (1974, 4 vols.)
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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(301) 975-2468
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(301) 975-2459