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Index of Semiconductor Process Gases - Chlorine

CHLORINE

M.W. [1]

70.9054

N.B.P [2]

239.12 K

T.P [2]

172.12 K

Cl2

Pc [3]

7.71 MPa

Tc [3]

417.15 K

Vc [3]

0.124 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

1%

1%

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

5%

5%

Reference

2

4

5

5

5

5

6

7,8

240

3.94

105.14

-457.65

990.9

-53928

548995

16.8

10.8

250

3.97

159.80

-419.2

893.9

-34941

390113

17.3

11.2

260

4.00

234.33

-385.8

812.1

-21911

280192

17.8

11.7

270

4.03

333.02

-356.5

742.2

-12871

202823

18.3

12.2

280

4.05

460.43

-330.6

682.2

-6549

147542

18.7

12.6

290

4.07

621.30

-307.6

630.1

-2106

107524

19.2

13.1

300

4.09

820.54

-287.0

584.5

1020

78223

19.7

13.5

310

4.11

1063.14

-268.5

544.5

3214

56561

20.1

14.0

320

4.13

1354.20

-251.8

509.1

4742

40412

20.5

14.4

330

4.15

1698.86

-236.6

477.5

5791

28292

21.0

14.8

340

4.16

2102.36

-222.8

449.3

6494

19146

21.4

15.3

350

4.18

2569.99

-210.1

423.9

6944

12216

21.8

15.7

360

4.19

3107.13

-198.5

401.0

7211

6853

22.2

16.1

370

4.21

3719.29

-187.8

380.3

7345

2951

22.6

16.6

380

4.22

4412.14

-177.9

361.4

7381

-88

23.0

17.0

390

4.23

5191.52

-168.8

344.1

7348

-2390

23.4

17.4

400

4.24

6063.50

-160.3

328.3

7264

-4123

23.8

17.8

410

4.26

7034.44

-152.3

313.8

7146

-5415

24.2

18.2

420

4.27

-

-144.9

300.4

7003

-6365

24.6

18.7

430

4.28

-

-138.0

288.0

6845

-7049

24.9

19.1

440

4.28

-

-131.5

276.6

6677

-7526

25.3

19.5

450

4.29

-

-125.4

265.9

6504

-7839

25.7

19.9

460

4.30

-

-119.7

256.0

6330

-8027

26.0

20.3

470

4.31

-

-114.3

246.7

6156

-8115

26.4

20.7

480

4.32

-

-109.2

238.0

5985

-8127

26.7

21.1

490

4.33

-

-104.4

229.9

5818

-8079

27.1

21.5

500

4.33

-

-99.8

222.3

5655

-7985

27.4

21.9

550

4.37

-

-80.2

190.4

4930

-7146

29.1

23.9

600

4.39

-

-64.7

166.0

4352

-6123

30.8

25.8

650

4.42

-

-52.2

146.9

3901

-5165

32.3

27.7

700

4.44

-

-41.9

131.5

3549

-4337

33.8

29.5

750

4.45

-

-33.3

118.9

3274

-3643

35.2

31.3

800

4.47

-

-26.0

108.4

3058

-3068

36.6

33.1

850

4.48

-

-19.7

99.4

2887

-2593

38.0

34.8

900

4.49

-

-14.2

91.8

2750

-2201

39.3

36.6

950

4.50

-

-9.4

85.2

2640

-1876

40.6

38.2

1000

4.51

-

-5.2

79.4

2551

-1606

41.9

39.9

References:

  1. IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
  2. "Selected Values of Properties of Chemical Compounds", Data Project; Thermodynamics Research Center, Texas A&M University, College Station, Texas (1980-extant. loose-leaf data sheets).
  3. Mathews, J.F., "The Critical Constants of Inorganic Substances", Chem. Rev. (1972, 72, 71).
  4. Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517.)
  5. Hurly, J.J., unpublished results
  6. Powell, R.W., Liley, P.E., Ho, C.Y., "Thermal Conductivity of the Elements", J. Phys. Chem. Ref. Data (1972, 1, 279).
  7. Laby, T.H., Kaye, G.W.C., "Tables of Physical and Chemical Constants, 14th ed.", Longman Group, Limited, London (1973).
  8. Matheson Gas Data Book, unabridged ed., Matheson Company, Inc. East Rutherford, NJ (1974, 4 vols.)

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 18, 2009, Updated December 5, 2019