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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Sulfur Dioxide

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SULFUR
DIOXIDE

M.W. [1]

64.066

N.B.P [1]

256.61 K

T.P [1]

197.7 K

SO2

Pc [1]

7.88 MPa

Tc [1]

430.65 K

Vc [1]

0.122026 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

-

-

-

-

-

-

-

-

Reference

-

-

1

1

1

1

1

1

280

4.71

-

-518.30

1628.1

1020.5

-

10.44

12.08

290

4.75

-

-464.80

1426.2

2620.2

-

10.93

12.52

300

4.80

-

-419.37

1258.1

5286.0

-

11.42

12.97

310

4.85

-

-380.48

1117.2

7215.3

-

11.91

13.41

320

4.89

-

-346.94

998.2

8586.1

-

12.42

13.85

330

4.94

-

-317.81

897.1

9532.5

-

12.92

14.29

340

4.98

-

-292.35

81.05

10156.0

-

13.43

14.73

350

5.02

-

-269.96

735.9

10534.0

-

13.94

15.17

360

5.06

-

-250.15

671.3

10724.0

-

14.45

15.61

370

5.11

-

-232.54

615.0

10774.0

-

14.97

16.04

380

5.15

-

-216.81

565.7

10716.0

-

15.49

16.47

390

5.19

-

-202.69

522.2

10580.0

-

16.01

16.90

400

5.23

-

-189.97

483.7

10384.0

-

16.53

17.33

410

5.27

-

-178.45

449.4

10146.0

-

17.06

17.75

420

5.31

-

-168.00

418.8

9877.8

-

17.58

18.18

430

5.34

-

-158.47

391.3

9589.3

-

18.11

18.60

440

5.38

-

-149.77

366.5

9288.2

-

18.63

19.01

450

5.42

-

-141.79

344.0

8980.1

-

19.16

19.43

460

5.45

-

-134.45

323.6

8669.5

-

19.69

19.84

470

5.49

-

-127.69

305.0

8360.0

-

20.21

20.24

480

5.52

-

-121.45

288.0

8053.9

-

20.74

20.65

490

5.56

-

-115.68

272.3

7753.4

-

21.26

21.05

500

5.59

-

-110.33

257.9

7459.8

-

21.79

21.45

550

5.74

-

-88.62

200.3

6121.5

-

24.39

23.40

600

5.88

-

-73.05

159.1

5015.3

-

26.95

25.28

650

6.01

-

-61.59

128.3

4120.6

-

29.46

27.09

700

6.11

-

-52.98

104.5

3400.9

-

31.90

28.85

750

6.21

-

-46.44

85.6

2821.4

-

34.27

30.55

800

-

-

-

-

-

-

-

-

850

-

-

-

-

-

-

-

-

900

-

-

-

-

-

-

-

-

950

-

-

-

-

-

-

-

-

1000

-

-

-

-

-

-

-

-

References:

  1. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0 Beta, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Chemistry, Electronics, Semiconductors, Standards, Reference data and Reference materials

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Created December 31, 2009, Updated December 5, 2019