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Index of Semiconductor Process Gases - Boron Trichloride

BORON
TRICHLORIDE

M.W. [1]

117.169

N.B.P [2]

285.65 K

T.P [3]

166.15 K

BCl3

Pc [4]

3.87 MPa

Tc [4]

451.95 K

Vc [5]

0.1483 m3/kmol

Note: In the tables, is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

1%/+0.1%

1%

 

 

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

 

10%

10%

Reference

6/+7

8

7

7

7

7

7

7

290

+7.45

119

-780.9

1760.5

-138842

1531523

#7.4

#12.0

295

+7.49

141

-751.4

1685.1

-114510

1320367

#7.5

#12.2

300

+7.53

166

-723.7

1614.9

-93866

1140490

#7.7

#12.3

305

+7.57

195

-697.5

1549.6

-76314

986761

#7.8

#12.5

310

+7.62

227

-672.8

1488.6

-61365

854979

#7.9

#12.6

315

+7.66

263

-649.5

1431.6

-48611

741684

#8.1

#12.8

320

+7.70

303

-627.4

1378.2

-37717

644020

#8.2

#13.0

340

+7.85

508

-549.5

1195.3

-7749

367768

#8.8

#13.6

360

+7.99

799

-485.5

1050.6

8360

208501

#9.4

#14.2

380

+8.12

1195

-431.9

934.1

16889

114183

#9.9

#14.9

400

+8.25

1719

-386.5

838.6

21178

57261

#10.5

#15.5

420

+8.36

2397

-347.5

759.1

23062

22529

#11.0

#16.2

440

+8.46

3264

-313.8

692.2

23580

1292

#11.6

#16.8

450

+8.51

3781

-298.6

662.6

23524

-5958

#11.9

#17.1

460

+8.55

-

-284.3

635.2

23329

-11574

#12.1

#17.4

480

*8.66

-

-258.4

586.2

22661

-19171

#12.7

#18.1

500

*8.74

-

-235.3

543.6

21784

-23414

#13.3

#18.7

550

*8.91

-

-187.7

458.6

19357

-26247

#14.6

#20.3

600

*9.05

-

-150.7

395.2

17136

-24375

#16.0

#21.9

650

*9.17

-

-121.0

346.2

15307

-21206

#17.3

#23.4

700

*9.26

-

-96.8

307.5

13856

-17943

#18.6

#25.0

750

*9.34

-

-76.7

276.1

12722

-14986

#19.9

#26.5

800

*9.41

-

-59.8

250.2

11838

-12436

#21.2

#28.0

850

*9.47

-

-45.3

228.4

11151

-10284

#22.4

#29.5

900

*9.52

-

-32.8

210.0

10615

-8485

#23.6

#30.9

950

*9.56

-

-21.8

194.1

10198

-6987

#24.8

#32.3

1000

*9.60

-

-12.3

180.3

9872

-5739

#26.0

#33.7

References:

  1. IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
  2. "Handbook of Chemistry and Physics," 62nd ed., the Chemical Rubber Co., Cleveland, OH (1981).
  3. "Predicted by Project Staff at The Pennsylvania State University using either published or internal methods.
  4. Lynn, Jr., R.E., and Kobe, K.A., "The Critical Properties of Elements and Compounds," Chem. Rev. (1953, 52, 117).
  5. Matheson Gas Data Book, unabridged ed., Matheson Company, Inc. East Rutherford, NJ (1974, 4 vols.)
  6. "JANAF Thermochemical Tables," J. Phys. Chem. Ref. Data (1978, 7, 793). 1978 Supplement
  7. Hurly, J.J., "Thermophysical Properties of Gaseous HBr and BCl3 from Speed-of-Sound Measurements," Int. J. Thermophys. (2000, 21/4).
  8. Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).


Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 18, 2009, Updated December 5, 2019