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Index of Semiconductor Process Gases - Nitrogen

NITROGEN

M.W. [1]

28.0135

N.B.P [2]

77.344 K

T.P [2]

63.149 K

N2

Pc [2]

3.4 MPa

Tc [2]

126.2 K

Vc [3]

0.089413 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

1%

1%

3%

-

5%

-

3%

3%

Reference

4

3/4

5

5

5

5

6/7

6-9

77

3.50

97.19

-267.6

524.2

-7811

102120

7.4

5.4

80

3.50

136.90

-248.3

482.6

-4451

74995

7.7

5.6

85

3.50

228.82

-220.9

425.0

-877

45186

8.2

5.9

90

3.50

360.29

-197.9

378.6

1154

27157

8.7

6.3

95

3.50

540.22

-178.5

340.6

2299

15969

9.2

6.6

100

3.50

777.99

-161.9

309.0

2925

8892

9.7

7.0

110

3.50

1467.16

-134.9

259.7

3371

1425

10.6

7.6

120

3.50

2515.42

-113.9

223.2

3342

-1681

11.5

8.3

130

3.50

-

-97.2

195.2

3151

-2900

12.4

8.9

140

3.50

-

-83.6

173.0

2919

-3272

13.3

9.5

150

3.50

-

-72.3

155.2

2692

-3259

14.1

10.1

160

3.50

-

-62.7

140.5

2487

-3077

14.9

10.7

170

3.50

-

-54.6

128.2

2308

-2829

15.8

11.3

180

3.50

-

-47.6

117.8

2154

-2565

16.6

11.8

190

3.50

-

-41.4

108.8

2022

-2309

17.4

12.4

200

3.50

-

-36.1

101.1

1910

-2071

18.2

12.9

210

3.50

-

-31.3

94.3

1814

-1855

19.0

13.4

220

3.50

-

-27.0

88.3

1732

-1661

19.7

14.0

230

3.50

-

-23.2

83.0

1662

-1490

20.5

14.5

240

3.50

-

-19.8

78.2

1602

-1337

21.2

15.0

250

3.50

-

-16.7

74.0

1550

-1203

22.0

15.5

260

3.50

-

-13.9

70.1

1505

-1084

22.7

15.9

270

3.50

-

-11.3

66.6

1466

-979

23.5

16.4

280

3.50

-

-8.9

63.4

1433

-886

24.2

16.9

290

3.50

-

-6.8

60.4

1403

-804

24.9

17.3

300

3.50

-

-4.8

57.7

1377

-731

25.6

17.8

310

3.50

-

-2.9

55.2

1354

-666

26.3

18.2

320

3.50

-

-1.2

52.9

1334

-609

27.0

18.7

330

3.51

-

0.4

50.8

1316

-557

27.7

19.1

340

3.51

-

1.9

48.8

1300

-512

28.4

19.6

350

3.51

-

3.3

46.9

1286

-471

29.1

20.0

360

3.51

-

4.6

45.2

1273

-435

29.8

20.4

370

3.51

-

5.8

43.6

1262

-402

30.5

20.8

380

3.51

-

6.9

42.1

1251

-373

31.1

21.2

390

3.52

-

8.0

40.6

1242

-347

31.8

21.7

400

3.52

-

9.0

39.3

1233

-324

32.5

22.1

410

3.52

-

10.0

38.0

1226

-303

33.1

22.5

420

3.52

-

10.9

36.8

1219

-284

33.8

22.8

430

3.53

-

11.7

35.6

1212

-267

34.4

23.2

440

3.53

-

12.5

34.5

1206

-252

35.1

23.6

450

3.53

-

13.3

33.5

1201

-238

35.7

24.0

460

3.54

-

14.0

32.5

1195

-226

36.4

24.4

470

3.54

-

14.7

31.6

1191

-215

37.0

24.8

480

3.55

-

15.4

30.7

1186

-205

37.6

25.1

490

3.55

-

16.0

29.8

1182

-196

38.3

25.5

500

3.56

-

16.6

29.0

1178

-188

38.9

25.9

550

3.59

-

19.2

25.5

1162

-159

42.0

27.7

600

3.62

-

21.3

22.5

1149

-144

45.0

29.4

650

3.66

-

23.0

20.1

1138

-136

48.0

31.1

700

3.70

-

24.4

18.0

1128

-133

50.9

32.7

750

3.74

-

25.6

16.2

1118

-134

53.8

34.2

800

3.78

-

26.6

14.7

1110

-137

56.6

35.8

850

3.82

-

27.4

13.4

1101

-141

59.4

37.3

900

3.86

-

28.1

12.2

1093

-146

62.2

38.7

950

3.90

-

28.8

11.1

1085

-151

64.9

40.1

1000

3.93

-

29.3

10.2

1077

-156

67.6

41.5

References:

  1. IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
  2. "Standard Tables of Physical Constants of Paraffin Hydrocarbons and Other Components of Natural Gas", Publication No. 2145-84; Gas Processors Association, Tulsa, Oklahoma (1984).
  3. "IUPAC; International Thermodynamic Tables of the Fluid State-Nitrogen", Pergammon Press, Oxford (1979).
  4. "TRC Thermodynamic Tables-Hydrocarbons", Thermodynamics Research Center, The Texas A&M University System, College Station, TX (1985).
  5. Estela-Uribe, J.F. and Trusler, J.P.M., "Acoustic and Volumetric Virial Coefficients of Nitrogen", Inter. J. Thermophys., In Press.
  6. Hanley, H.J.M. and Ely, J.F., "The Viscosity and Thermal Conductivity Coefficients of Dilute Nitrogen and Oxygen", J. Phys. Chem. Ref. Data (2, 735, 1973).
  7. McCarty, R.D., Haynes, W.M., and Hanley, H.J.M., "The Viscosity and Thermal Conductivity Coefficients for Dense Gaseous and Liquid Argon, Krypton, Xenon, Nitrogen, and Oxygen", J. Phys. Chem. Ref. Data (3, 979, 1974).
  8. Wakeham, W. A., Cole, W.A., "The Viscosity of Nitrogen, Oxygen and their Binary Mixtures in the Limit of Zero Density", J. Phys. Chem. Ref. Data (14, 209, 1985).
  9. Younglove, B.A., "Thermophysical Properties of Fluids.1. Argon, Ethylene, Parahydrogen, Nitrogen, Nitrogen trifluoride, and Oxygen", J. Phys. Chem. Ref. Data (11. Suppl. No. 1., 1982).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 31, 2009, Updated December 5, 2019