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Index of Semiconductor Process Gases - Nitrous Oxide

NITROUS
OXIDE

M.W. [1]

44.0128

N.B.P [2]

184.67 K

T.P [2]

182.3 K

N2O

Pc [3]

7.245 MPa

Tc [3]

309.57 K

Vc [3]

0.09718 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

1%/0.1%

-

 Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

-

+0.1%/*- 

Reference

4

5

4

4

4

4

5

5/6

200

4.04

374.99

-311.9

678.0

-47794

475438

#10.9

+9.98

210

4.10

573.1

-280.7

603.9

-28691

317801

#14.6

+10.47

220

4.17

840.95

-254.0

542.4

-16447

214933

#15.1

+10.95

230

4.23

1192

-231.1

490.7

-8505

146401

#15.6

+11.43

240

4.30

1640.2

-211.2

446.9

-3318

99939

#16.2

+11.92

250

4.36

2200.2

-193.7

409.4

73

67976

#16.7

+12.40

260

4.42

2887.4

-178.3

377.0

2280

45721

#17.2

+12.88

270

4.48

3718.6

-164.6

348.8

3695

30079

#17.7

+13.36

280

4.54

4713.4

-152.4

324.0

4577

19007

#18.2

+13.84

290

4.59

5897.3

-141.4

302.2

5099

11136

#18.7

+14.32

300

4.65

-

-131.5

282.8

5377

5529

#18.6

+14.80

310

4.70

-

-122.5

265.5

5490

1543

#19.4

+15.28

320

4.76

-

-114.3

250.0

5491

-1275

#20.2

+15.76

330

4.81

-

-106.9

236.1

5420

-3246

#21.0

+16.24

340

4.86

-

-100.0

223.5

5302

-4599

#21.8

+16.71

350

4.91

-

-93.7

212.0

5155

-5499

#22.6

+17.19

360

4.95

-

-87.9

201.6

4991

-6068

#23.4

+17.67

370

5.00

-

-82.5

192.0

4820

-6392

#24.2

+18.14

380

5.04

-

-77.5

183.3

4647

-6538

#25.0

+18.58

390

5.09

-

-72.8

175.2

4477

-6554

#25.8

#19.02

400

5.13

-

-68.5

167.8

4312

-6476

#26.6

#19.45

410

5.17

-

-64.4

160.9

4154

-6330

#27.3

#19.88

420

5.21

-

-60.6

154.5

4003

-6137

#28.1

#20.30

430

5.25

-

-57.0

148.6

3861

-5913

#28.9

#20.72

440

5.29

-

-53.7

143.1

3728

-5667

#29.7

#21.14

450

5.33

-

-50.5

137.9

3604

-5410

#30.5

#21.55

460

5.37

-

-47.6

133.1

3488

-5147

#31.3

#21.96

470

5.41

-

-44.7

128.6

3380

-4882

#32.1

#22.36

480

5.44

-

-42.1

124.4

3280

-4620

-

-

490

5.48

-

-39.6

120.4

3187

-4362

-

-

500

5.51

-

-37.2

116.6

3102

-4112

-

-

550

5.68

-

-26.8

100.7

2764

-2987

-

-

600

5.82

-

-18.6

88.5

2545

-2091

-

-

650

5.96

-

-11.9

78.8

2406

-1397

-

-

700

6.08

-

-6.4

70.9

2323

-863

-

-

750

6.19

-

-1.7

64.5

2278

-452

-

-

800

6.29

-

2.3

59.0

2259

-134

-

-

850

6.38

-

5.7

54.4

2259

112

-

-

900

6.46

-

8.7

50.5

2271

304

-

-

950

6.54

-

11.3

47.0

2291

454

-

-

1000

6.61

-

13.7

44.0

2318

571

-

-

References:

  1. IUPAC; "Atomic Weights of the Elements 1999", J Phys Chem Ref Data (2001, 30, 701).
  2. Westrum, E.F., Stull, D.R., and Sinke, G.C., "The Chemical Thermodynamics of Organic Compounds (John Wiley and Sons, New York, 1969).
  3. Mathews, J.F., Chem. Rev. (1972, 72, 71).
  4. Hurly, J.J., "Thermodynamic Properties of Nitrous Oxide and Nitric Oxide from Speed of Sound Measurements, Int. J. Thermophys. (2003, v24, 1611).
  5. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
  6. Hurly, J.J., "The Viscosity and Speed of Sound in Gaseous Nitrous Oxide and Nitrogen Trifluoride Measured with a Greenspan Viscometer," Int. J. Thermophys. (2004, v25, 625).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 31, 2009, Updated December 5, 2019