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Index of Semiconductor Process Gases - Nitrous Oxide
|
NITROUS |
M.W. [1] 44.0128 |
N.B.P [2] 184.67 K |
T.P [2] 182.3 K |
|
N2O |
Pc [3] 7.245 MPa |
Tc [3] 309.57 K |
Vc [3] 0.09718 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
1%/0.1% |
- |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
- |
+0.1%/*- |
|||
|
Reference |
||||||||
|
200 |
4.04 |
374.99 |
-311.9 |
678.0 |
-47794 |
475438 |
#10.9 |
+9.98 |
|
210 |
4.10 |
573.1 |
-280.7 |
603.9 |
-28691 |
317801 |
#14.6 |
+10.47 |
|
220 |
4.17 |
840.95 |
-254.0 |
542.4 |
-16447 |
214933 |
#15.1 |
+10.95 |
|
230 |
4.23 |
1192 |
-231.1 |
490.7 |
-8505 |
146401 |
#15.6 |
+11.43 |
|
240 |
4.30 |
1640.2 |
-211.2 |
446.9 |
-3318 |
99939 |
#16.2 |
+11.92 |
|
250 |
4.36 |
2200.2 |
-193.7 |
409.4 |
73 |
67976 |
#16.7 |
+12.40 |
|
260 |
4.42 |
2887.4 |
-178.3 |
377.0 |
2280 |
45721 |
#17.2 |
+12.88 |
|
270 |
4.48 |
3718.6 |
-164.6 |
348.8 |
3695 |
30079 |
#17.7 |
+13.36 |
|
280 |
4.54 |
4713.4 |
-152.4 |
324.0 |
4577 |
19007 |
#18.2 |
+13.84 |
|
290 |
4.59 |
5897.3 |
-141.4 |
302.2 |
5099 |
11136 |
#18.7 |
+14.32 |
|
300 |
4.65 |
- |
-131.5 |
282.8 |
5377 |
5529 |
#18.6 |
+14.80 |
|
310 |
4.70 |
- |
-122.5 |
265.5 |
5490 |
1543 |
#19.4 |
+15.28 |
|
320 |
4.76 |
- |
-114.3 |
250.0 |
5491 |
-1275 |
#20.2 |
+15.76 |
|
330 |
4.81 |
- |
-106.9 |
236.1 |
5420 |
-3246 |
#21.0 |
+16.24 |
|
340 |
4.86 |
- |
-100.0 |
223.5 |
5302 |
-4599 |
#21.8 |
+16.71 |
|
350 |
4.91 |
- |
-93.7 |
212.0 |
5155 |
-5499 |
#22.6 |
+17.19 |
|
360 |
4.95 |
- |
-87.9 |
201.6 |
4991 |
-6068 |
#23.4 |
+17.67 |
|
370 |
5.00 |
- |
-82.5 |
192.0 |
4820 |
-6392 |
#24.2 |
+18.14 |
|
380 |
5.04 |
- |
-77.5 |
183.3 |
4647 |
-6538 |
#25.0 |
+18.58 |
|
390 |
5.09 |
- |
-72.8 |
175.2 |
4477 |
-6554 |
#25.8 |
#19.02 |
|
400 |
5.13 |
- |
-68.5 |
167.8 |
4312 |
-6476 |
#26.6 |
#19.45 |
|
410 |
5.17 |
- |
-64.4 |
160.9 |
4154 |
-6330 |
#27.3 |
#19.88 |
|
420 |
5.21 |
- |
-60.6 |
154.5 |
4003 |
-6137 |
#28.1 |
#20.30 |
|
430 |
5.25 |
- |
-57.0 |
148.6 |
3861 |
-5913 |
#28.9 |
#20.72 |
|
440 |
5.29 |
- |
-53.7 |
143.1 |
3728 |
-5667 |
#29.7 |
#21.14 |
|
450 |
5.33 |
- |
-50.5 |
137.9 |
3604 |
-5410 |
#30.5 |
#21.55 |
|
460 |
5.37 |
- |
-47.6 |
133.1 |
3488 |
-5147 |
#31.3 |
#21.96 |
|
470 |
5.41 |
- |
-44.7 |
128.6 |
3380 |
-4882 |
#32.1 |
#22.36 |
|
480 |
5.44 |
- |
-42.1 |
124.4 |
3280 |
-4620 |
- |
- |
|
490 |
5.48 |
- |
-39.6 |
120.4 |
3187 |
-4362 |
- |
- |
|
500 |
5.51 |
- |
-37.2 |
116.6 |
3102 |
-4112 |
- |
- |
|
550 |
5.68 |
- |
-26.8 |
100.7 |
2764 |
-2987 |
- |
- |
|
600 |
5.82 |
- |
-18.6 |
88.5 |
2545 |
-2091 |
- |
- |
|
650 |
5.96 |
- |
-11.9 |
78.8 |
2406 |
-1397 |
- |
- |
|
700 |
6.08 |
- |
-6.4 |
70.9 |
2323 |
-863 |
- |
- |
|
750 |
6.19 |
- |
-1.7 |
64.5 |
2278 |
-452 |
- |
- |
|
800 |
6.29 |
- |
2.3 |
59.0 |
2259 |
-134 |
- |
- |
|
850 |
6.38 |
- |
5.7 |
54.4 |
2259 |
112 |
- |
- |
|
900 |
6.46 |
- |
8.7 |
50.5 |
2271 |
304 |
- |
- |
|
950 |
6.54 |
- |
11.3 |
47.0 |
2291 |
454 |
- |
- |
|
1000 |
6.61 |
- |
13.7 |
44.0 |
2318 |
571 |
- |
- |
References:
- IUPAC; "Atomic Weights of the Elements 1999", J Phys Chem Ref Data (2001, 30, 701).
- Westrum, E.F., Stull, D.R., and Sinke, G.C., "The Chemical Thermodynamics of Organic Compounds (John Wiley and Sons, New York, 1969).
- Mathews, J.F., Chem. Rev. (1972, 72, 71).
- Hurly, J.J., "Thermodynamic Properties of Nitrous Oxide and Nitric Oxide from Speed of Sound Measurements, Int. J. Thermophys. (2003, v24, 1611).
- Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
- Hurly, J.J., "The Viscosity and Speed of Sound in Gaseous Nitrous Oxide and Nitrogen Trifluoride Measured with a Greenspan Viscometer," Int. J. Thermophys. (2004, v25, 625).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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