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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Carbon Dioxide

CARBON
DIOXIDE

M.W. [1]

44.010

N.B.P [1]

194.75 K

T.P [1]

216.59 K

CO₂

Pc [1]

7.3773 MPa

Tc [1]

304.13 K

Vc [1]

0.094118 m³/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T K	$$ \frac{C_P^0(T)} {R} $$	Vapor Pressure kPa	B(T) cm³· mol^-1	dB/dT·T cm³· mol^-1	C(T) cm⁶· mol^-2	dC/dT·T cm⁶· mol^-2	λ mW/ (m·K)	η µPa·s
Estimated Uncertainty	<1%	-	Densities calculated should be good to 0.5% away from coexistence curve.				0.5%	5%
Reference	1	-	1	1	1	1	1	1
220	4.011	-	-247.59	584.1	5239.6	-	10.84	11.05
230	4.070	-	-223.09	519.7	5505.0	-	11.50	11.56
240	4.130	-	-202.13	466.5	5575.4	-	12.19	12.06
250	4.190	-	-184.02	422.0	5528.1	-	12.90	12.56
260	4.249	-	-168.22	384.3	5411.3	-	13.63	13.05
270	4.308	-	-154.33	352.1	5255.4	-	14.38	13.55
280	4.365	-	-142.04	324.4	5079.8	-	15.16	14.04
290	4.422	-	-131.09	300.3	4896.5	-	15.95	14.53
300	4.477	-	-121.27	279.1	4713.1	-	16.75	15.01
310	4.532	-	-112.43	260.5	4533.9	-	17.56	15.50
320	4.585	-	-104.42	244.1	4361.5	-	18.38	15.98
330	4.637	-	-97.14	229.4	4197.6	-	19.21	16.45
340	4.688	-	-90.50	216.2	4043.0	-	20.05	16.93
350	4.738	-	-84.40	204.3	3897.7	-	20.89	17.40
360	4.787	-	-78.80	193.6	3761.6	-	21.73	17.86
370	4.834	-	-73.63	183.9	3634.2	-	22.57	18.32
380	4.881	-	-68.84	175.0	3515.3	-	23.42	18.78
390	4.927	-	-64.40	166.9	3404.2	-	24.27	19.24
400	4.971	-	-60.27	159.5	3300.4	-	25.11	19.69
410	5.015	-	-56.42	152.7	3203.4	-	25.96	20.14
420	5.058	-	-52.81	146.4	3112.7	-	26.80	20.58
430	5.099	-	-49.44	140.5	3027.8	-	27.64	21.02
440	5.140	-	-46.27	135.1	2948.3	-	28.48	21.46
450	5.180	-	-43.29	130.1	2873.8	-	29.32	21.90
460	5.219	-	-40.49	125.4	2803.8	-	30.15	22.33
470	5.258	-	-37.84	121.0	2738.1	-	30.98	22.75
480	5.295	-	-35.34	116.9	2676.2	-	31.81	23.18
490	5.332	-	-32.97	113.0	2617.9	-	32.64	23.60
500	5.368	-	-30.72	109.4	2562.9	-	33.47	24.01
550	5.538	-	-21.04	94.1	2329.5	-	37.54	26.04
600	5.692	-	-13.37	82.5	2148.9	-	41.53	28.00
650	5.833	-	-7.15	73.3	2005.3	-	45.45	29.87
700	5.962	-	-2.00	365.8	1888.4	-	49.28	31.67
750	6.079	-	2.32	59.6	1791.0	-	53.03	33.41
800	6.187	-	6.00	54.5	1708.5	-	56.69	35.09
850	6.285	-	9.16	50.0	1637.5	-	60.28	36.70
900	6.375	-	11.92	46.2	1575.4	-	63.79	38.27
950	6.457	-	14.32	42.9	1520.5	-	67.21	39.79
1000	6.532	-	16.45	40.0	1471.5	-	70.56	41.26

References:

Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.