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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Carbon Dioxide

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CARBON
DIOXIDE

M.W. [1]

44.010

N.B.P [1]

194.75 K

T.P [1]

216.59 K

CO2

Pc [1]

7.3773 MPa

Tc [1]

304.13 K

Vc [1]

0.094118 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

<1%

-

 Densities calculated should be good to 0.5% away from coexistence curve.

0.5%

5%

Reference

1

-

1

1

1

1

1

1

220

4.011

-

-247.59

584.1

5239.6

-

10.84

11.05

230

4.070

-

-223.09

519.7

5505.0

-

11.50

11.56

240

4.130

-

-202.13

466.5

5575.4

-

12.19

12.06

250

4.190

-

-184.02

422.0

5528.1

-

12.90

12.56

260

4.249

-

-168.22

384.3

5411.3

-

13.63

13.05

270

4.308

-

-154.33

352.1

5255.4

-

14.38

13.55

280

4.365

-

-142.04

324.4

5079.8

-

15.16

14.04

290

4.422

-

-131.09

300.3

4896.5

-

15.95

14.53

300

4.477

-

-121.27

279.1

4713.1

-

16.75

15.01

310

4.532

-

-112.43

260.5

4533.9

-

17.56

15.50

320

4.585

-

-104.42

244.1

4361.5

-

18.38

15.98

330

4.637

-

-97.14

229.4

4197.6

-

19.21

16.45

340

4.688

-

-90.50

216.2

4043.0

-

20.05

16.93

350

4.738

-

-84.40

204.3

3897.7

-

20.89

17.40

360

4.787

-

-78.80

193.6

3761.6

-

21.73

17.86

370

4.834

-

-73.63

183.9

3634.2

-

22.57

18.32

380

4.881

-

-68.84

175.0

3515.3

-

23.42

18.78

390

4.927

-

-64.40

166.9

3404.2

-

24.27

19.24

400

4.971

-

-60.27

159.5

3300.4

-

25.11

19.69

410

5.015

-

-56.42

152.7

3203.4

-

25.96

20.14

420

5.058

-

-52.81

146.4

3112.7

-

26.80

20.58

430

5.099

-

-49.44

140.5

3027.8

-

27.64

21.02

440

5.140

-

-46.27

135.1

2948.3

-

28.48

21.46

450

5.180

-

-43.29

130.1

2873.8

-

29.32

21.90

460

5.219

-

-40.49

125.4

2803.8

-

30.15

22.33

470

5.258

-

-37.84

121.0

2738.1

-

30.98

22.75

480

5.295

-

-35.34

116.9

2676.2

-

31.81

23.18

490

5.332

-

-32.97

113.0

2617.9

-

32.64

23.60

500

5.368

-

-30.72

109.4

2562.9

-

33.47

24.01

550

5.538

-

-21.04

94.1

2329.5

-

37.54

26.04

600

5.692

-

-13.37

82.5

2148.9

-

41.53

28.00

650

5.833

-

-7.15

73.3

2005.3

-

45.45

29.87

700

5.962

-

-2.00

365.8

1888.4

-

49.28

31.67

750

6.079

-

2.32

59.6

1791.0

-

53.03

33.41

800

6.187

-

6.00

54.5

1708.5

-

56.69

35.09

850

6.285

-

9.16

50.0

1637.5

-

60.28

36.70

900

6.375

-

11.92

46.2

1575.4

-

63.79

38.27

950

6.457

-

14.32

42.9

1520.5

-

67.21

39.79

1000

6.532

-

16.45

40.0

1471.5

-

70.56

41.26

References:

  1. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Chemistry, Electronics, Semiconductors, Standards, Reference data and Reference materials

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Created December 18, 2009, Updated March 1, 2023