Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Index of Semiconductor Process Gases - Tungsten Hexafluoride

TUNGSTEN
HEXAFLUORIDE

M.W. [1]

297.84

N.B.P [2]

290.25 K

T.P [2]

275.0 K

WF6

Pc [3]

4.57 MPa

Tc [3]

452.7 K

Vc [3]

0.1 m3/kmol

Note: In the tables, #is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Esti-
mated
Un-
certainty

1%/0.1%

1%

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

10%

10%

Ref-
erence

4,5

6

5

5

5

5

5

5

205

11.84

0.19

-2001.6

5951.2

-4658932

47121716

-

-

210

12.00

0.34

-1864.5

5441.0

-3653771

36754361

-

-

215

12.16

0.58

-1741.8

4994.1

-2884907

28924191

#5.2

#14.17

220

+12.66

0.95

-1631.6

4600.8

-2291407

22949084

#5.4

#14.41

225

+12.78

1.53

-1532.2

4252.9

-1829413

18345717

#5.6

#14.64

230

+12.90

2.39

-1442.1

3943.9

-1466994

14767456

#5.7

#14.88

235

+13.03

3.62

-1360.3

3668.3

-1180656

11962851

#5.9

#15.11

240

+13.15

5.37

-1285.7

3421.6

-952936

9747555

#6.0

#15.35

245

+13.26

7.79

-1217.5

3199.8

-770738

7985050

#6.2

#15.58

250

+13.38

11.08

-1154.9

2999.9

-624150

6573288

#6.3

#15.81

255

+13.49

15.47

-1097.3

2819.0

-505611

5435305

#6.5

#16.05

260

+13.60

21.22

-1044.2

2654.8

-409306

4512569

#6.6

#16.28

265

+13.71

28.66

-995.0

2505.4

-330733

3760214

#6.8

#16.51

270

+13.82

38.15

-949.5

2369.0

-266380

3143590

#6.9

#16.75

275

+13.92

50.09

-907.2

2244.1

-213492

2635750

#7.1

#16.98

280

+14.03

64.94

-867.8

2129.6

-169892

2215594

#7.3

#17.21

285

+14.13

83.21

-831.1

2024.3

-133851

1866498

#7.4

#17.44

290

+14.23

105.45

-796.7

1927.2

-103990

1575285

#7.6

#17.67

295

+14.33

-

-764.5

1837.5

-79201

1331447

#7.7

#17.91

300

+14.42

-

-734.4

1754.5

-58589

1126565

#7.9

#18.14

305

+14.52

-

-706.0

1677.4

-41432

953852

#8.0

#18.37

310

+14.61

-

-679.3

1605.9

-27139

807815

#8.2

#18.60

315

+14.70

-

-654.2

1539.2

-15228

683985

#8.3

#18.83

320

+14.78

-

-630.4

1477.0

-5306

578711

#8.5

#19.06

340

+15.12

-

-547.5

1265.9

20230

290555

#8.6

#19.29

360

+15.42

-

-480.0

1101.2

31966

134118

#9.2

#20.21

380

+15.68

-

-424.1

970.1

36670

47535

#9.8

#21.12

400

+15.92

-

-377.1

863.9

37762

-659

#10.4

#22.03

420

+16.13

-

-337.1

776.4

37023

-27161

#11.0

#22.93

440

*16.35

-

-302.7

703.3

35400

-41155

#11.6

#23.83

450

*16.45

-

-287.3

671.2

34428

-45187

#12.1

#24.73

460

*16.53

-

-272.9

641.7

33403

-47843

#12.4

#25.17

480

*16.70

-

-246.7

589.0

31305

-50243

#12.7

#25.62

500

*16.86

-

-223.6

543.6

29249

-50142

#13.3

#26.51

550

*17.24

-

-176.2

453.8

24678

-44989

#13.8

#27.39

600

*17.63

-

-139.7

387.8

21064

-37951

#15.2

#29.58

650

*18.09

-

-110.8

337.5

18293

-31353

#16.6

#31.75

700

*18.69

-

-87.2

298.0

16181

-25746

#17.9

#33.89

750

*19.49

-

-67.8

266.3

14567

-21142

#19.2

#36.01

800

*20.53

-

-51.5

240.3

13326

-17405

#20.5

#38.10

850

*21.89

-

-37.6

218.6

12365

-14375

#21.7

#40.16

900

*23.62

-

-25.6

200.3

11616

-11914

#22.9

#42.20

950

*25.77

-

-15.2

184.7

11027

-9906

#24.1

#44.21

1000

*28.41

-

-6.1

171.2

10562

-8257

#25.3

#46.20

References:

  1. IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
  2. Westrum, E.F., Pure and Appl Chem. (8, 187, 1964).
  3. Malyshev, V.V., Teplofizika Vysokikh Temperatur (11, 1010, 1973).
  4. Chase, M.W., "NIST-JANAF Thermochemical Tables, Fourth Edition", J. Phys. Chem. Ref. Data, Monograph 9 (1-1951, 1998).
  5. Hurly, J.J. "Thermophysical Properties of Gaseous Tungsten Hexafluoride from Speed-of-Sound Measurements", Int. J. Thermophys. (21, 1, 2000).
  6. Stull, D.R., "Vapor Pressure of Pure Substances", Ind. Eng. Chem. (39, 517, 1947).

Footnote:

#is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 31, 2009, Updated November 26, 2019