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Index of Semiconductor Process Gases - Tungsten Hexafluoride

TUNGSTEN
HEXAFLUORIDE

M.W. [1]

297.84

N.B.P [2]

290.25 K

T.P [2]

275.0 K

WF6

Pc [3]

4.57 MPa

Tc [3]

452.7 K

Vc [3]

0.1 m3/kmol

Note: In the tables, #is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Esti-
mated
Un-
certainty

1%/0.1%

1%

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

10%

10%

Ref-
erence

4,5

6

5

5

5

5

5

5

205

11.84

0.19

-2001.6

5951.2

-4658932

47121716

-

-

210

12.00

0.34

-1864.5

5441.0

-3653771

36754361

-

-

215

12.16

0.58

-1741.8

4994.1

-2884907

28924191

#5.2

#14.17

220

+12.66

0.95

-1631.6

4600.8

-2291407

22949084

#5.4

#14.41

225

+12.78

1.53

-1532.2

4252.9

-1829413

18345717

#5.6

#14.64

230

+12.90

2.39

-1442.1

3943.9

-1466994

14767456

#5.7

#14.88

235

+13.03

3.62

-1360.3

3668.3

-1180656

11962851

#5.9

#15.11

240

+13.15

5.37

-1285.7

3421.6

-952936

9747555

#6.0

#15.35

245

+13.26

7.79

-1217.5

3199.8

-770738

7985050

#6.2

#15.58

250

+13.38

11.08

-1154.9

2999.9

-624150

6573288

#6.3

#15.81

255

+13.49

15.47

-1097.3

2819.0

-505611

5435305

#6.5

#16.05

260

+13.60

21.22

-1044.2

2654.8

-409306

4512569

#6.6

#16.28

265

+13.71

28.66

-995.0

2505.4

-330733

3760214

#6.8

#16.51

270

+13.82

38.15

-949.5

2369.0

-266380

3143590

#6.9

#16.75

275

+13.92

50.09

-907.2

2244.1

-213492

2635750

#7.1

#16.98

280

+14.03

64.94

-867.8

2129.6

-169892

2215594

#7.3

#17.21

285

+14.13

83.21

-831.1

2024.3

-133851

1866498

#7.4

#17.44

290

+14.23

105.45

-796.7

1927.2

-103990

1575285

#7.6

#17.67

295

+14.33

-

-764.5

1837.5

-79201

1331447

#7.7

#17.91

300

+14.42

-

-734.4

1754.5

-58589

1126565

#7.9

#18.14

305

+14.52

-

-706.0

1677.4

-41432

953852

#8.0

#18.37

310

+14.61

-

-679.3

1605.9

-27139

807815

#8.2

#18.60

315

+14.70

-

-654.2

1539.2

-15228

683985

#8.3

#18.83

320

+14.78

-

-630.4

1477.0

-5306

578711

#8.5

#19.06

340

+15.12

-

-547.5

1265.9

20230

290555

#8.6

#19.29

360

+15.42

-

-480.0

1101.2

31966

134118

#9.2

#20.21

380

+15.68

-

-424.1

970.1

36670

47535

#9.8

#21.12

400

+15.92

-

-377.1

863.9

37762

-659

#10.4

#22.03

420

+16.13

-

-337.1

776.4

37023

-27161

#11.0

#22.93

440

*16.35

-

-302.7

703.3

35400

-41155

#11.6

#23.83

450

*16.45

-

-287.3

671.2

34428

-45187

#12.1

#24.73

460

*16.53

-

-272.9

641.7

33403

-47843

#12.4

#25.17

480

*16.70

-

-246.7

589.0

31305

-50243

#12.7

#25.62

500

*16.86

-

-223.6

543.6

29249

-50142

#13.3

#26.51

550

*17.24

-

-176.2

453.8

24678

-44989

#13.8

#27.39

600

*17.63

-

-139.7

387.8

21064

-37951

#15.2

#29.58

650

*18.09

-

-110.8

337.5

18293

-31353

#16.6

#31.75

700

*18.69

-

-87.2

298.0

16181

-25746

#17.9

#33.89

750

*19.49

-

-67.8

266.3

14567

-21142

#19.2

#36.01

800

*20.53

-

-51.5

240.3

13326

-17405

#20.5

#38.10

850

*21.89

-

-37.6

218.6

12365

-14375

#21.7

#40.16

900

*23.62

-

-25.6

200.3

11616

-11914

#22.9

#42.20

950

*25.77

-

-15.2

184.7

11027

-9906

#24.1

#44.21

1000

*28.41

-

-6.1

171.2

10562

-8257

#25.3

#46.20

References:

  1. IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
  2. Westrum, E.F., Pure and Appl Chem. (8, 187, 1964).
  3. Malyshev, V.V., Teplofizika Vysokikh Temperatur (11, 1010, 1973).
  4. Chase, M.W., "NIST-JANAF Thermochemical Tables, Fourth Edition", J. Phys. Chem. Ref. Data, Monograph 9 (1-1951, 1998).
  5. Hurly, J.J. "Thermophysical Properties of Gaseous Tungsten Hexafluoride from Speed-of-Sound Measurements", Int. J. Thermophys. (21, 1, 2000).
  6. Stull, D.R., "Vapor Pressure of Pure Substances", Ind. Eng. Chem. (39, 517, 1947).

Footnote:

#is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 31, 2009, Updated November 26, 2019