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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Oxygen

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OXYGEN

M.W. [1]

31.999

N.B.P [1]

90.188 K

T.P [1]

54.361 K

O2

Pc [1]

5.0430 MPa

Tc [1]

154.58 K

Vc [1]

0.073368 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

2%

-

Densities are calculated should be good to 0.5% away from coexistence curve.

2%

0.5%

Reference

1

-

1

1

1

1

1

1

200

3.50

-

-49.63

111.08

1519.90

-

18.37

14.61

210

3.50

-

-44.40

103.39

1426.80

-

19.22

15.24

220

3.51

-

-39.75

96.65

1343.60

-

20.07

15.87

230

3.51

-

-35.59

90.69

1269.70

-

20.91

16.48

240

3.51

-

-31.84

85.38

1204.20

-

21.74

17.09

250

3.51

-

-28.45

80.62

1146.10

-

22.57

17.68

260

3.52

-

-25.38

76.33

1094.70

-

23.39

18.27

270

3.52

-

-22.57

72.43

1049.10

-

24.21

18.85

280

3.52

-

-20.00

68.88

1008.50

-

25.02

19.42

290

3.53

-

-17.64

65.63

972.44

-

25.83

19.98

300

3.53

-

-15.47

62.64

940.30

-

26.64

20.54

310

3.54

-

-13.46

59.88

911.60

-

27.44

21.09

320

3.55

-

-11.60

57.33

885.95

-

28.25

21.63

330

3.55

-

-9.87

54.97

862.98

-

29.05

22.16

340

3.56

-

-8.26

52.76

842.38

-

29.85

22.69

350

3.57

-

-6.76

50.71

823.89

-

30.65

23.21

360

3.58

-

-5.36

48.79

807.28

-

31.46

23.73

370

3.59

-

-4.05

47.00

792.33

-

32.26

24.24

380

3.60

-

-2.82

45.31

778.87

-

33.06

24.74

390

3.61

-

-1.66

43.72

766.75

-

33.87

25.24

400

3.62

-

-0.58

42.23

755.83

-

34.67

25.74

410

3.63

-

0.45

40.82

745.99

-

35.48

26.22

420

3.64

-

1.42

39.49

737.12

-

36.29

26.71

430

3.65

-

2.33

38.23

729.13

-

37.09

27.18

440

3.67

-

3.20

37.04

721.94

-

37.90

27.66

450

3.68

-

4.02

35.91

715.47

-

38.71

28.12

460

3.69

-

4.79

34.83

709.66

-

39.51

28.59

470

3.70

-

5.53

22.81

704.45

-

40.32

29.05

480

3.72

-

6.23

32.84

699.79

-

41.13

29.50

490

3.73

-

6.90

31.92

695.62

-

41.93

29.95

500

3.74

-

7.54

31.03

691.92

-

42.74

30.40

550

3.80

-

10.31

27.18

679.07

-

46.75

32.58

600

3.86

-

12.53

24.06

673.30

-

50.73

34.66

650

3.92

-

14.36

21.50

672.36

-

54.65

36.67

700

3.97

-

15.87

19.36

674.82

-

58.49

38.62

750

4.01

-

17.14

17.56

679.69

-

62.25

40.49

800

4.06

-

18.22

16.02

686.32

-

65.93

42.32

850

4.10

-

19.15

14.69

694.23

-

69.51

44.09

900

4.13

-

19.96

13.54

703.10

-

72.99

45.82

950

4.16

-

20.66

12.52

712.68

-

76.38

47.50

1000

4.19

-

21.28

11.63

722.78

-

79.68

49.14

References:

  1. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Chemistry, Electronics, Semiconductors, Standards, Reference data and Reference materials

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Created December 31, 2009, Updated December 5, 2019