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Nanotechnology

Advancing nanoscale measurement science, standards, and nanotechnology is an important component of NIST's mission to promote U.S. innovation and industrial competitiveness. From leading cutting edge research to coordinating the development of standards that promote trade, NIST's programs in nanotechnology directly impact priorities important to the nation's economy and well being.

News and Updates

Industry Impacts

Nanolithography Design Tools

Accurate production of nanoscale features on semiconductor chips is essential to their performance, but typical design tools cater to the dominance of straight

Projects and Programs

Metrology for Nanolithography

Our goal is to develop measurements that quantify the shape, size, orientation, and fidelity of nanoscale patterns as a platform to quantitatively evaluate

Publications

Photorealistic full-color nanopainting enabled by a low-loss metasurface

Author(s)
Pengcheng Huo, Maowen Song, Wenqi Zhu, Cheng Zhang, Lu Chen, Henri J. Lezec, Yanqing Lu, Amit K. Agrawal, Ting Xu
We design and experimentally demonstrate a TiO2 metasurface that enables full-color generation and ultrasmooth color brightness variations. The reproduced

Software

CNST Nanolithography Toolbox

The Nanolithography Toolbox is a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and

HolograFREE

An electron hologram is a fringe modulated image containing the amplitude and phase information of an electron transparent object. The HolograFREE routines

SOEN Process Design Kits

This technology package, a.k.a process design kit (PDK), defines the NIST superconducting optoelectronics process: OLMAC. It is in the klayout format of

MOSAIC

MOSAIC is a modular single-molecule analysis toolbox to decode multi-state single-molecule and nanopore time-series data. Read the documentation for additional

Tools and Instruments

NanoFab Tool: RCA Wet Bench B102

The Reynolds RCA wet bench is used to remove organic and metal contamination from the surfaces of substrates prior to high temperature furnace processing. The

Awards