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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Hydrogen Sulfide

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HYDROGEN SULFIDE

M.W. [1]

34.082

N.B.P [1]

212.88 K

T.P [1]

187.7 K

H2S

Pc [1]

9.0080 MPa

Tc [1]

373.6 K

Vc [1]

0.098203 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

MPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

-

-

-

-

-

-

-

-

Reference

1

-

1

1

1

1

1

1

200

4.021

0.050

-479.34

1186.68

3562.3

-

11.37

8.49

210

4.028

0.087

-425.31

1032.13

3559.5

-

12.01

8.93

220

4.035

0.144

-380.30

906.25

3550.4

-

12.65

9.36

230

4.044

0.225

-342.38

802.59

3536.6

-

13.30

9.80

240

4.053

0.337

-310.10

716.38

3519.0

-

13.95

10.24

250

4.063

0.489

-282.36

644.00

3498.6

-

14.61

10.69

260

4.074

0.687

-258.33

582.71

3475.9

-

15.28

11.13

270

4.085

0.940

-237.34

530.39

3451.6

-

15.95

11.57

280

4.097

1.256

-218.89

485.44

3425.9

-

16.62

12.01

290

4.110

1.643

-202.55

466.48

3399.3

-

17.30

12.44

300

4.123

2.112

-188.00

412.56

3372.0

-

17.98

12.88

310

4.137

2.670

-174.96

382.82

3344.3

-

18.67

13.32

320

4.152

3.330

-163.23

356.61

3316.2

-

19.36

13.75

330

4.167

4.100

-152.62

333.37

3288.0

-

20.05

14.18

340

4.182

4.994

-142.98

312.68

3259.8

-

20.75

14.61

350

4.198

6.026

-134.19

294.17

3231.6

-

21.45

15.04

360

4.214

7.213

-126.14

277.53

3203.6

-

22.15

15.46

370

4.231

8.577

-118.75

262.52

3175.8

-

22.85

15.588

380

4.248

-

-111.93

248.92

3148.3

-

23.56

16.30

390

4.266

-

-105.63

236.55

3121.0

-

24.27

16.71

400

4.284

-

-99.78

225.27

3094.0

-

24.98

17.12

410

4.302

-

-94.35

214.94

3067.4

-

25.69

17.53

420

4.321

-

-89.28

205.45

3041.2

-

26.41

17.93

430

4.340

-

-84.55

196.71

3015.3

-

27.12

18.34

440

4.359

-

-80.12

188.64

2989.9

-

27.84

18.73

450

4.379

-

-75.97

181.17

2964.8

-

28.56

19.13

460

4.399

-

-72.06

174.23

2940.1

-

29.29

19.52

470

4.419

-

-68.39

167.78

2915.9

-

30.01

19.91

480

4.439

-

-64.92

161.76

2892.0

-

30.74

20.29

490

4.460

-

-61.64

156.12

2868.5

-

31.46

20.68

500

4.481

-

-58.54

150.85

2845.5

-

32.19

21.06

550

4.586

-

-45.25

128.83

2735.9

-

35.86

22.91

600

4.695

-

-34.79

112.15

2635.5

-

39.57

24.68

650

4.805

-

-26.35

99.06

2543.5

-

43.31

26.40

700

4.914

-

-19.40

88.52

2458.8

-

47.07

28.06

750

5.022

-

-13.60

79.85

2380.8

-

50.85

29.66

800

5.128

-

-8.69

72.57

2308.7

-

54.64

31.22

850

5.232

-

-4.48

66.38

2241.8

-

58.44

32.74

900

5.333

-

-0.84

61.04

2179.7

-

62.24

34.22

950

5.431

-

2.34

56.40

2121.7

-

66.05

35.66

1000

5.527

-

5.12

52.31

2067.6

-

69.85

37.06

References:

  1. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Chemistry, Electronics, Semiconductors, Standards, Reference data and Reference materials

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Created December 31, 2009, Updated December 5, 2019