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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Hydrogen Sulfide

HYDROGEN SULFIDE

M.W. [1]

34.082

N.B.P [1]

212.88 K

T.P [1]

187.7 K

H₂S

Pc [1]

9.0080 MPa

Tc [1]

373.6 K

Vc [1]

0.098203 m³/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T K	$$ \frac{C_P^0(T)} {R} $$	Vapor Pressure MPa	B(T) cm³· mol^-1	dB/dT·T cm³· mol^-1	C(T) cm⁶· mol^-2	dC/dT·T cm⁶· mol^-2	λ mW/ (m·K)	η µPa·s
Estimated Uncertainty	-	-	-	-	-	-	-	-
Reference	1	-	1	1	1	1	1	1
200	4.021	0.050	-479.34	1186.68	3562.3	-	11.37	8.49
210	4.028	0.087	-425.31	1032.13	3559.5	-	12.01	8.93
220	4.035	0.144	-380.30	906.25	3550.4	-	12.65	9.36
230	4.044	0.225	-342.38	802.59	3536.6	-	13.30	9.80
240	4.053	0.337	-310.10	716.38	3519.0	-	13.95	10.24
250	4.063	0.489	-282.36	644.00	3498.6	-	14.61	10.69
260	4.074	0.687	-258.33	582.71	3475.9	-	15.28	11.13
270	4.085	0.940	-237.34	530.39	3451.6	-	15.95	11.57
280	4.097	1.256	-218.89	485.44	3425.9	-	16.62	12.01
290	4.110	1.643	-202.55	466.48	3399.3	-	17.30	12.44
300	4.123	2.112	-188.00	412.56	3372.0	-	17.98	12.88
310	4.137	2.670	-174.96	382.82	3344.3	-	18.67	13.32
320	4.152	3.330	-163.23	356.61	3316.2	-	19.36	13.75
330	4.167	4.100	-152.62	333.37	3288.0	-	20.05	14.18
340	4.182	4.994	-142.98	312.68	3259.8	-	20.75	14.61
350	4.198	6.026	-134.19	294.17	3231.6	-	21.45	15.04
360	4.214	7.213	-126.14	277.53	3203.6	-	22.15	15.46
370	4.231	8.577	-118.75	262.52	3175.8	-	22.85	15.588
380	4.248	-	-111.93	248.92	3148.3	-	23.56	16.30
390	4.266	-	-105.63	236.55	3121.0	-	24.27	16.71
400	4.284	-	-99.78	225.27	3094.0	-	24.98	17.12
410	4.302	-	-94.35	214.94	3067.4	-	25.69	17.53
420	4.321	-	-89.28	205.45	3041.2	-	26.41	17.93
430	4.340	-	-84.55	196.71	3015.3	-	27.12	18.34
440	4.359	-	-80.12	188.64	2989.9	-	27.84	18.73
450	4.379	-	-75.97	181.17	2964.8	-	28.56	19.13
460	4.399	-	-72.06	174.23	2940.1	-	29.29	19.52
470	4.419	-	-68.39	167.78	2915.9	-	30.01	19.91
480	4.439	-	-64.92	161.76	2892.0	-	30.74	20.29
490	4.460	-	-61.64	156.12	2868.5	-	31.46	20.68
500	4.481	-	-58.54	150.85	2845.5	-	32.19	21.06
550	4.586	-	-45.25	128.83	2735.9	-	35.86	22.91
600	4.695	-	-34.79	112.15	2635.5	-	39.57	24.68
650	4.805	-	-26.35	99.06	2543.5	-	43.31	26.40
700	4.914	-	-19.40	88.52	2458.8	-	47.07	28.06
750	5.022	-	-13.60	79.85	2380.8	-	50.85	29.66
800	5.128	-	-8.69	72.57	2308.7	-	54.64	31.22
850	5.232	-	-4.48	66.38	2241.8	-	58.44	32.74
900	5.333	-	-0.84	61.04	2179.7	-	62.24	34.22
950	5.431	-	2.34	56.40	2121.7	-	66.05	35.66
1000	5.527	-	5.12	52.31	2067.6	-	69.85	37.06

References:

Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Chemistry, Electronics, Semiconductors, Standards, Reference data and Reference materials

Contacts

Keith A Gillis

[email protected]

(301) 975-2468
Michael R Moldover

[email protected]

(301) 975-2459

Created December 31, 2009, Updated September 25, 2025

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