Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Index of Semiconductor Process Gases - Argon

ARGON

M.W. [1]

39.948

N.B.P [2]

87.28 K

T.P [2]

83.78K

Ar

Pc [2]

4.898 MPa

Tc [2]

150.86 K

Vc [2]

0.07459 m3/kmol

Note: In the tables, is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

-

-

5%

-

10%

-

3%

3%

Reference

-

-

3

3

3

3

3

3

100

2.5

-

-181.99

334.7

-972.1

30165

6.4

8.2

110

2.5

-

-152.82

279.5

1015.8

13432

7.0

9.0

120

2.5

-

-130.32

238.9

1804.8

5534

7.6

9.7

130

2.5

-

-112.47

208.0

2076.3

1643

8.2

10.5

140

2.5

-

-97.98

183.7

2118.4

-307

8.8

11.3

150

2.5

-

-85.99

164.2

2060.4

-1271

9.5

12.1

160

2.5

-

-75.92

148.3

1962.1

-1719

10.1

12.9

170

2.5

-

-67.34

135.0

1851.7

-1891

10.7

13.7

180

2.5

-

-59.95

123.7

1742.4

-1914

11.3

14.4

190

2.5

-

-53.53

114.1

1640.2

-1858

11.9

15.2

200

2.5

-

-47.89

105.8

1547.2

-1763

12.4

15.9

210

2.5

-

-42.91

98.6

1463.9

-1651

13.0

16.7

220

2.5

-

-38.47

92.2

1389.8

-1533

13.6

17.4

230

2.5

-

-34.50

86.5

1324.2

-1417

14.1

18.1

240

2.5

-

-30.93

81.5

1266.3

-1307

14.7

18.8

250

2.5

-

-27.69

76.9

1215.1

-1203

15.2

19.5

260

2.5

-

-24.76

72.9

1169.7

-1108

15.7

20.2

270

2.5

-

-22.08

69.2

1129.6

-1020

16.3

20.8

280

2.5

-

-19.63

65.8

1094.0

-941

16.8

21.5

290

2.5

-

-17.37

62.7

1062.2

-868

17.3

22.1

300

2.5

-

-15.30

59.9

1033.9

-802

17.8

22.8

310

2.5

-

-13.38

57.2

1008.6

-743

18.3

23.4

320

2.5

-

-11.60

54.8

985.9

-689

18.8

24.0

330

2.5

-

-9.944

52.6

965.5

-640

19.3

24.7

340

2.5

-

-8.406

50.5

947.1

-595

19.7

25.3

350

2.5

-

-6.970

48.6

930.4

-555

20.2

25.9

360

2.5

-

-5.627

46.8

915.3

-519

20.7

26.5

370

2.5

-

-4.369

45.1

901.5

-485

21.1

27.0

380

2.5

-

-3.188

43.5

889.0

-455

21.6

27.6

390

2.5

-

-2.078

42.0

877.5

-428

22.0

28.2

400

2.5

-

-1.033

40.6

867.0

-403

22.5

28.8

410

2.5

-

-0.048

39.3

857.3

-380

22.9

29.3

420

2.5

-

0.883

38.0

848.4

-359

23.4

29.9

430

2.5

-

1.763

36.8

840.2

-341

23.8

30.4

440

2.5

-

2.596

35.7

832.6

-323

24.2

31.0

450

2.5

-

3.386

34.6

825.5

-308

24.6

31.5

460

2.5

-

4.136

33.6

818.9

-293

25.1

32.0

470

2.5

-

4.848

32.6

812.7

-280

25.5

32.6

480

2.5

-

5.526

31.7

807.0

-268

25.9

33.1

490

2.5

-

6.171

30.8

801.6

-257

26.3

33.6

500

2.5

-

6.785

30.0

796.5

-247

26.7

34.1

550

2.5

-

9.466

26.3

774.9

-207

28.7

36.6

600

2.5

-

11.623

23.3

758.1

-182

30.5

39.0

650

2.5

-

13.388

20.8

744.3

-165

32.4

41.3

700

2.5

-

14.851

18.7

732.5

-154

34.1

43.6

750

2.5

-

16.078

16.9

722.0

-148

35.8

45.7

800

2.5

-

17.117

15.3

712.6

-144

37.5

47.9

850

2.5

-

18.005

14.0

703.9

-142

39.1

49.9

900

2.5

-

18.768

12.8

695.8

-142

40.7

51.9

950

2.5

-

19.428

11.7

688.1

-142

42.2

53.9

1000

2.5

-

20.003

10.7

680.8

-144

43.8

55.8

References:

  1. IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
  2. IUPAC, "International Thermodynamic Tables of the Fluid State - Argon," Butterworths, London (1972).
  3. Aziz, R.A., "A Highly Accurate Interatomic Potential for Argon," J. Chem. Phys. (1993, 99, 4518).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 16, 2009, Updated December 5, 2019