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Index of Semiconductor Process Gases - Argon
|
ARGON |
M.W. [1] 39.948 |
N.B.P [2] 87.28 K |
T.P [2] 83.78K |
|
Ar |
Pc [2] 4.898 MPa |
Tc [2] 150.86 K |
Vc [2] 0.07459 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
- |
- |
5% |
- |
10% |
- |
3% |
3% |
|
Reference |
- |
- |
||||||
|
100 |
2.5 |
- |
-181.99 |
334.7 |
-972.1 |
30165 |
6.4 |
8.2 |
|
110 |
2.5 |
- |
-152.82 |
279.5 |
1015.8 |
13432 |
7.0 |
9.0 |
|
120 |
2.5 |
- |
-130.32 |
238.9 |
1804.8 |
5534 |
7.6 |
9.7 |
|
130 |
2.5 |
- |
-112.47 |
208.0 |
2076.3 |
1643 |
8.2 |
10.5 |
|
140 |
2.5 |
- |
-97.98 |
183.7 |
2118.4 |
-307 |
8.8 |
11.3 |
|
150 |
2.5 |
- |
-85.99 |
164.2 |
2060.4 |
-1271 |
9.5 |
12.1 |
|
160 |
2.5 |
- |
-75.92 |
148.3 |
1962.1 |
-1719 |
10.1 |
12.9 |
|
170 |
2.5 |
- |
-67.34 |
135.0 |
1851.7 |
-1891 |
10.7 |
13.7 |
|
180 |
2.5 |
- |
-59.95 |
123.7 |
1742.4 |
-1914 |
11.3 |
14.4 |
|
190 |
2.5 |
- |
-53.53 |
114.1 |
1640.2 |
-1858 |
11.9 |
15.2 |
|
200 |
2.5 |
- |
-47.89 |
105.8 |
1547.2 |
-1763 |
12.4 |
15.9 |
|
210 |
2.5 |
- |
-42.91 |
98.6 |
1463.9 |
-1651 |
13.0 |
16.7 |
|
220 |
2.5 |
- |
-38.47 |
92.2 |
1389.8 |
-1533 |
13.6 |
17.4 |
|
230 |
2.5 |
- |
-34.50 |
86.5 |
1324.2 |
-1417 |
14.1 |
18.1 |
|
240 |
2.5 |
- |
-30.93 |
81.5 |
1266.3 |
-1307 |
14.7 |
18.8 |
|
250 |
2.5 |
- |
-27.69 |
76.9 |
1215.1 |
-1203 |
15.2 |
19.5 |
|
260 |
2.5 |
- |
-24.76 |
72.9 |
1169.7 |
-1108 |
15.7 |
20.2 |
|
270 |
2.5 |
- |
-22.08 |
69.2 |
1129.6 |
-1020 |
16.3 |
20.8 |
|
280 |
2.5 |
- |
-19.63 |
65.8 |
1094.0 |
-941 |
16.8 |
21.5 |
|
290 |
2.5 |
- |
-17.37 |
62.7 |
1062.2 |
-868 |
17.3 |
22.1 |
|
300 |
2.5 |
- |
-15.30 |
59.9 |
1033.9 |
-802 |
17.8 |
22.8 |
|
310 |
2.5 |
- |
-13.38 |
57.2 |
1008.6 |
-743 |
18.3 |
23.4 |
|
320 |
2.5 |
- |
-11.60 |
54.8 |
985.9 |
-689 |
18.8 |
24.0 |
|
330 |
2.5 |
- |
-9.944 |
52.6 |
965.5 |
-640 |
19.3 |
24.7 |
|
340 |
2.5 |
- |
-8.406 |
50.5 |
947.1 |
-595 |
19.7 |
25.3 |
|
350 |
2.5 |
- |
-6.970 |
48.6 |
930.4 |
-555 |
20.2 |
25.9 |
|
360 |
2.5 |
- |
-5.627 |
46.8 |
915.3 |
-519 |
20.7 |
26.5 |
|
370 |
2.5 |
- |
-4.369 |
45.1 |
901.5 |
-485 |
21.1 |
27.0 |
|
380 |
2.5 |
- |
-3.188 |
43.5 |
889.0 |
-455 |
21.6 |
27.6 |
|
390 |
2.5 |
- |
-2.078 |
42.0 |
877.5 |
-428 |
22.0 |
28.2 |
|
400 |
2.5 |
- |
-1.033 |
40.6 |
867.0 |
-403 |
22.5 |
28.8 |
|
410 |
2.5 |
- |
-0.048 |
39.3 |
857.3 |
-380 |
22.9 |
29.3 |
|
420 |
2.5 |
- |
0.883 |
38.0 |
848.4 |
-359 |
23.4 |
29.9 |
|
430 |
2.5 |
- |
1.763 |
36.8 |
840.2 |
-341 |
23.8 |
30.4 |
|
440 |
2.5 |
- |
2.596 |
35.7 |
832.6 |
-323 |
24.2 |
31.0 |
|
450 |
2.5 |
- |
3.386 |
34.6 |
825.5 |
-308 |
24.6 |
31.5 |
|
460 |
2.5 |
- |
4.136 |
33.6 |
818.9 |
-293 |
25.1 |
32.0 |
|
470 |
2.5 |
- |
4.848 |
32.6 |
812.7 |
-280 |
25.5 |
32.6 |
|
480 |
2.5 |
- |
5.526 |
31.7 |
807.0 |
-268 |
25.9 |
33.1 |
|
490 |
2.5 |
- |
6.171 |
30.8 |
801.6 |
-257 |
26.3 |
33.6 |
|
500 |
2.5 |
- |
6.785 |
30.0 |
796.5 |
-247 |
26.7 |
34.1 |
|
550 |
2.5 |
- |
9.466 |
26.3 |
774.9 |
-207 |
28.7 |
36.6 |
|
600 |
2.5 |
- |
11.623 |
23.3 |
758.1 |
-182 |
30.5 |
39.0 |
|
650 |
2.5 |
- |
13.388 |
20.8 |
744.3 |
-165 |
32.4 |
41.3 |
|
700 |
2.5 |
- |
14.851 |
18.7 |
732.5 |
-154 |
34.1 |
43.6 |
|
750 |
2.5 |
- |
16.078 |
16.9 |
722.0 |
-148 |
35.8 |
45.7 |
|
800 |
2.5 |
- |
17.117 |
15.3 |
712.6 |
-144 |
37.5 |
47.9 |
|
850 |
2.5 |
- |
18.005 |
14.0 |
703.9 |
-142 |
39.1 |
49.9 |
|
900 |
2.5 |
- |
18.768 |
12.8 |
695.8 |
-142 |
40.7 |
51.9 |
|
950 |
2.5 |
- |
19.428 |
11.7 |
688.1 |
-142 |
42.2 |
53.9 |
|
1000 |
2.5 |
- |
20.003 |
10.7 |
680.8 |
-144 |
43.8 |
55.8 |
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- IUPAC, "International Thermodynamic Tables of the Fluid State - Argon," Butterworths, London (1972).
- Aziz, R.A., "A Highly Accurate Interatomic Potential for Argon," J. Chem. Phys. (1993, 99, 4518).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
-
(301) 975-2468
-
(301) 975-2459