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Index of Semiconductor Process Gases - Hexafluoroethane

HEXAFLUOROETHANE

M.W. [1]

138.012

N.B.P [2]

194.95 K

T.P [3]

173.1 K

C2F6

Pc [4]

2.98 MPa

Tc [5]

292.8 K

Vc [5]

0.22188 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

kPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

*1%/+0.1%

1%

Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.

#10%

#10%/
+0.5%

Reference

*6/+7

2,8,9

7

7

7

7

10

4,11/,12

170

*8.90

21.78

-954.2

2352.7

-392157

3843692

#-

#-

175

*9.08

30.77

-888.8

2164.3

-294095

2960987

#-

#8.7

180

*9.25

42.60

-830.1

1999.3

-220399

2299063

#-

#8.9

185

*9.43

57.87

-777.4

1854.0

-164559

1797381

#-

#9.2

190

*9.60

77.28

-729.7

1725.3

-121947

1413439

#-

#9.5

195

*9.76

101.59

-686.4

1610.9

-89229

1116994

#7.4

#9.7

200

*9.93

131.61

-646.9

1508.5

-63978

886255

#7.7

#10.0

205

*10.09

168.24

-610.8

1416.6

-44407

705336

#8.0

#10.2

210

*10.25

212.39

-577.7

1333.8

-29191

562532

#8.2

#10.5

215

*10.41

265.06

-547.2

1258.9

-17334

449129

#8.5

#10.8

220

*10.56

327.26

-519.0

1190.9

-8084

358581

#8.8

#11.0

225

*10.72

400.05

-493.0

1128.9

-869

285925

#9.1

+11.0

230

*10.87

484.51

-468.8

1072.3

4752

227370

#9.4

+11.2

235

*11.02

581.75

-446.3

1020.4

9116

179997

#9.7

+11.5

240

*11.17

692.88

-425.3

972.7

12488

141540

#10.0

+11.7

245

*11.32

819.02

-405.7

928.7

15074

110231

#10.3

+11.9

250

*11.46

961.29

-387.4

888.1

17035

84680

#10.6

+12.1

255

*11.61

1120.81

-370.2

850.5

18499

63791

#10.9

+12.4

260

*11.75

1298.69

-354.0

815.6

19567

46688

#11.2

+12.6

265

*11.89

1496.00

-338.8

783.2

20318

32676

#11.6

+12.8

270

*12.03

1713.84

-324.4

752.9

20819

21193

#11.9

+13.0

275

*12.17

1953.23

-310.9

724.7

21119

11787

#12.2

+13.2

280

*12.30

2215.22

-298.0

698.3

21260

4093

#12.5

+13.5

285

*12.44

2500.79

-285.9

673.6

21275

-2187

#12.8

+13.7

290

*12.57

2810.92

-274.4

650.4

21191

-7297

#13.2

+13.9

292.8

*12.64

2995.66

-268.2

638.0

21109

-9723

#13.4

+14.0

295

*12.70

-

-263.5

628.5

21030

-11436

#13.5

+14.1

300

+12.85

-

-253.1

608.0

20808

-14769

#13.8

+14.3

305

+12.97

-

-243.2

588.6

20541

-17430

#14.2

+14.5

310

+13.10

-

-233.8

570.3

20240

-19532

#14.5

+14.7

315

+13.23

-

-224.8

553.0

19914

-21168

#14.9

+14.9

320

+13.35

-

-216.2

536.7

19571

-22414

#15.2

+15.1

340

+13.83

-

-185.5

479.2

18126

-24650

#16.6

+15.9

360

+14.28

-

-159.4

432.0

16719

-24290

#18.1

+16.7

380

+14.71

-

-137.2

392.7

15444

-22736

#19.5

#18.5

400

+15.11

-

-117.9

359.4

14329

-20697

#21.0

#19.3

420

+15.48

-

-101.1

331.0

13371

-18536

#22.6

#20.1

440

+15.83

-

-86.2

306.5

12558

-16431

#24.2

#21.0

460

+16.16

-

-73.1

285.2

11871

-14465

#25.8

#21.8

480

*16.43

-

-61.4

266.4

11294

-12672

#27.4

#22.6

500

*16.71

-

-50.8

249.8

10810

-11060

#29.1

#23.3

550

*17.33

-

-28.7

215.7

9919

-7759

#33.5

#25.2

600

*17.85

-

-11.1

189.3

9354

-5324

#38.0

#27.0

650

*18.29

-

3.2

168.3

9002

-3533

#42.7

#28.7

700

*18.66

-

15.0

151.3

8791

-2212

#47.5

#30.4

750

*18.98

-

25.0

137.2

8673

-1233

#52.6

#32.0

800

*19.25

-

33.4

125.3

8618

-505

#57.8

#33.6

850

*19.48

-

40.7

115.1

8604

38

#63.1

#35.1

900

*19.67

-

47.0

106.4

8619

443

#68.6

#36.6

950

*19.85

-

52.6

98.7

8651

744

#74.2

#38.0

1000

*20.00

-

57.5

92.0

8695

966

#79.9

#39.4

References:

  1. IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
  2. "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
  3. Westrum, Jr., E.F., Stull, D.R., and Sinke, G.C., "The Chemical Thermodynamics of ORganic Compounds," John Wiley and Sons, New York (1969).
  4. "Freon Products," E.I. DuPont de Nemours & Col., Inc., Freon Products Division, Wilmington, DE (1969).
  5. Zwolinski, B.J., Kudchadker, A.P., Alani, G.H., "The Critical Constants of Organic Substances," Chem. Rev. (1968, 68, 659).
  6. Chase, M., "JANAF Thermochemical Table, 3rd Edition," J. Phys. Chem. Ref. Data (198, 14) Supplement #1.
  7. Hurly, J.J., "Thermophysical Properties of Gaseous CF4 and C2F6 from Speed-of-Sound Measurements, Int. J. Thermophys. (1999, 20, 455).
  8. Ruff, O. and Keim, R., "Die Reaktions Produkte der Verschiedenen Kohlearten mit Fluor. I. Das Kohlenstoff-4-Fluorid (Tetrafluormethan)," Z. Anorg. Allg. Chem. (1930, 192, 249).
  9. Hala, E., Fried, V. and Boublik, T., "The Vapour Pressures of Pure Substances," Elsevier, New York (1973).
  10. Clifford, A.A., Dickinson, E., and Gray, P., "Thermal Conductivities of Gaseous Alkane + Perfluoralkane Mixtures," J. Chem. Soc. Faraday Trans. I (1976).
  11. Reichenberg, D., "The Viscosity of Organic Vapors at Low Pressures," DSC Rep. 11, National Physical Laboratory, Teddington, England (August 1971).
  12. Hurly, J.J., Gillis, K.A., Mehl, J.B., and Moldover, M.R., "The Viscosity of Seven Gases Measured with a Greenspan Viscometer," Int. J. Thermophys. (2003, Vol 24/6).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Created December 29, 2009, Updated December 5, 2019