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Index of Semiconductor Process Gases - Hexafluoroethane
|
HEXAFLUOROETHANE |
M.W. [1] 138.012 |
N.B.P [2] 194.95 K |
T.P [3] 173.1 K |
|
C2F6 |
Pc [4] 2.98 MPa |
Tc [5] 292.8 K |
Vc [5] 0.22188 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
*1%/+0.1% |
1% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
#10% |
#10%/ |
|||
|
Reference |
||||||||
|
170 |
*8.90 |
21.78 |
-954.2 |
2352.7 |
-392157 |
3843692 |
#- |
#- |
|
175 |
*9.08 |
30.77 |
-888.8 |
2164.3 |
-294095 |
2960987 |
#- |
#8.7 |
|
180 |
*9.25 |
42.60 |
-830.1 |
1999.3 |
-220399 |
2299063 |
#- |
#8.9 |
|
185 |
*9.43 |
57.87 |
-777.4 |
1854.0 |
-164559 |
1797381 |
#- |
#9.2 |
|
190 |
*9.60 |
77.28 |
-729.7 |
1725.3 |
-121947 |
1413439 |
#- |
#9.5 |
|
195 |
*9.76 |
101.59 |
-686.4 |
1610.9 |
-89229 |
1116994 |
#7.4 |
#9.7 |
|
200 |
*9.93 |
131.61 |
-646.9 |
1508.5 |
-63978 |
886255 |
#7.7 |
#10.0 |
|
205 |
*10.09 |
168.24 |
-610.8 |
1416.6 |
-44407 |
705336 |
#8.0 |
#10.2 |
|
210 |
*10.25 |
212.39 |
-577.7 |
1333.8 |
-29191 |
562532 |
#8.2 |
#10.5 |
|
215 |
*10.41 |
265.06 |
-547.2 |
1258.9 |
-17334 |
449129 |
#8.5 |
#10.8 |
|
220 |
*10.56 |
327.26 |
-519.0 |
1190.9 |
-8084 |
358581 |
#8.8 |
#11.0 |
|
225 |
*10.72 |
400.05 |
-493.0 |
1128.9 |
-869 |
285925 |
#9.1 |
+11.0 |
|
230 |
*10.87 |
484.51 |
-468.8 |
1072.3 |
4752 |
227370 |
#9.4 |
+11.2 |
|
235 |
*11.02 |
581.75 |
-446.3 |
1020.4 |
9116 |
179997 |
#9.7 |
+11.5 |
|
240 |
*11.17 |
692.88 |
-425.3 |
972.7 |
12488 |
141540 |
#10.0 |
+11.7 |
|
245 |
*11.32 |
819.02 |
-405.7 |
928.7 |
15074 |
110231 |
#10.3 |
+11.9 |
|
250 |
*11.46 |
961.29 |
-387.4 |
888.1 |
17035 |
84680 |
#10.6 |
+12.1 |
|
255 |
*11.61 |
1120.81 |
-370.2 |
850.5 |
18499 |
63791 |
#10.9 |
+12.4 |
|
260 |
*11.75 |
1298.69 |
-354.0 |
815.6 |
19567 |
46688 |
#11.2 |
+12.6 |
|
265 |
*11.89 |
1496.00 |
-338.8 |
783.2 |
20318 |
32676 |
#11.6 |
+12.8 |
|
270 |
*12.03 |
1713.84 |
-324.4 |
752.9 |
20819 |
21193 |
#11.9 |
+13.0 |
|
275 |
*12.17 |
1953.23 |
-310.9 |
724.7 |
21119 |
11787 |
#12.2 |
+13.2 |
|
280 |
*12.30 |
2215.22 |
-298.0 |
698.3 |
21260 |
4093 |
#12.5 |
+13.5 |
|
285 |
*12.44 |
2500.79 |
-285.9 |
673.6 |
21275 |
-2187 |
#12.8 |
+13.7 |
|
290 |
*12.57 |
2810.92 |
-274.4 |
650.4 |
21191 |
-7297 |
#13.2 |
+13.9 |
|
292.8 |
*12.64 |
2995.66 |
-268.2 |
638.0 |
21109 |
-9723 |
#13.4 |
+14.0 |
|
295 |
*12.70 |
- |
-263.5 |
628.5 |
21030 |
-11436 |
#13.5 |
+14.1 |
|
300 |
+12.85 |
- |
-253.1 |
608.0 |
20808 |
-14769 |
#13.8 |
+14.3 |
|
305 |
+12.97 |
- |
-243.2 |
588.6 |
20541 |
-17430 |
#14.2 |
+14.5 |
|
310 |
+13.10 |
- |
-233.8 |
570.3 |
20240 |
-19532 |
#14.5 |
+14.7 |
|
315 |
+13.23 |
- |
-224.8 |
553.0 |
19914 |
-21168 |
#14.9 |
+14.9 |
|
320 |
+13.35 |
- |
-216.2 |
536.7 |
19571 |
-22414 |
#15.2 |
+15.1 |
|
340 |
+13.83 |
- |
-185.5 |
479.2 |
18126 |
-24650 |
#16.6 |
+15.9 |
|
360 |
+14.28 |
- |
-159.4 |
432.0 |
16719 |
-24290 |
#18.1 |
+16.7 |
|
380 |
+14.71 |
- |
-137.2 |
392.7 |
15444 |
-22736 |
#19.5 |
#18.5 |
|
400 |
+15.11 |
- |
-117.9 |
359.4 |
14329 |
-20697 |
#21.0 |
#19.3 |
|
420 |
+15.48 |
- |
-101.1 |
331.0 |
13371 |
-18536 |
#22.6 |
#20.1 |
|
440 |
+15.83 |
- |
-86.2 |
306.5 |
12558 |
-16431 |
#24.2 |
#21.0 |
|
460 |
+16.16 |
- |
-73.1 |
285.2 |
11871 |
-14465 |
#25.8 |
#21.8 |
|
480 |
*16.43 |
- |
-61.4 |
266.4 |
11294 |
-12672 |
#27.4 |
#22.6 |
|
500 |
*16.71 |
- |
-50.8 |
249.8 |
10810 |
-11060 |
#29.1 |
#23.3 |
|
550 |
*17.33 |
- |
-28.7 |
215.7 |
9919 |
-7759 |
#33.5 |
#25.2 |
|
600 |
*17.85 |
- |
-11.1 |
189.3 |
9354 |
-5324 |
#38.0 |
#27.0 |
|
650 |
*18.29 |
- |
3.2 |
168.3 |
9002 |
-3533 |
#42.7 |
#28.7 |
|
700 |
*18.66 |
- |
15.0 |
151.3 |
8791 |
-2212 |
#47.5 |
#30.4 |
|
750 |
*18.98 |
- |
25.0 |
137.2 |
8673 |
-1233 |
#52.6 |
#32.0 |
|
800 |
*19.25 |
- |
33.4 |
125.3 |
8618 |
-505 |
#57.8 |
#33.6 |
|
850 |
*19.48 |
- |
40.7 |
115.1 |
8604 |
38 |
#63.1 |
#35.1 |
|
900 |
*19.67 |
- |
47.0 |
106.4 |
8619 |
443 |
#68.6 |
#36.6 |
|
950 |
*19.85 |
- |
52.6 |
98.7 |
8651 |
744 |
#74.2 |
#38.0 |
|
1000 |
*20.00 |
- |
57.5 |
92.0 |
8695 |
966 |
#79.9 |
#39.4 |
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
- Westrum, Jr., E.F., Stull, D.R., and Sinke, G.C., "The Chemical Thermodynamics of ORganic Compounds," John Wiley and Sons, New York (1969).
- "Freon Products," E.I. DuPont de Nemours & Col., Inc., Freon Products Division, Wilmington, DE (1969).
- Zwolinski, B.J., Kudchadker, A.P., Alani, G.H., "The Critical Constants of Organic Substances," Chem. Rev. (1968, 68, 659).
- Chase, M., "JANAF Thermochemical Table, 3rd Edition," J. Phys. Chem. Ref. Data (198, 14) Supplement #1.
- Hurly, J.J., "Thermophysical Properties of Gaseous CF4 and C2F6 from Speed-of-Sound Measurements, Int. J. Thermophys. (1999, 20, 455).
- Ruff, O. and Keim, R., "Die Reaktions Produkte der Verschiedenen Kohlearten mit Fluor. I. Das Kohlenstoff-4-Fluorid (Tetrafluormethan)," Z. Anorg. Allg. Chem. (1930, 192, 249).
- Hala, E., Fried, V. and Boublik, T., "The Vapour Pressures of Pure Substances," Elsevier, New York (1973).
- Clifford, A.A., Dickinson, E., and Gray, P., "Thermal Conductivities of Gaseous Alkane + Perfluoralkane Mixtures," J. Chem. Soc. Faraday Trans. I (1976).
- Reichenberg, D., "The Viscosity of Organic Vapors at Low Pressures," DSC Rep. 11, National Physical Laboratory, Teddington, England (August 1971).
- Hurly, J.J., Gillis, K.A., Mehl, J.B., and Moldover, M.R., "The Viscosity of Seven Gases Measured with a Greenspan Viscometer," Int. J. Thermophys. (2003, Vol 24/6).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
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