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Search Publications by: David S Simons (Assoc)

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Displaying 51 - 74 of 74

Automated SIMS for Determining Isotopic Distributions in Particle Polutations

February 1, 1998
Author(s)
David S. Simons, John G. Gillen, Cynthia J. Zeissler, R H. Fleming, P J. McNitt
A System has been developed to make rapid automated measurements of isotopic ratios from many individual micrometer-sized particles dispersed on a substrate. High particle throughput is achieved by using a commercial secondary ion microscope to collect

Dose Calibration of Ion Implanters for Semiconductor Production

February 1, 1998
Author(s)
F A. Stevie, David S. Simons, J M. McKinley, J McMacken, R Santiesteban, P Flatch, J Becerro
Absolute dose calibration is important for process simulation and transfer of manufacturing to different production line or locations, but until recently, no viable standards were available. With the creation of a NIST standard for boron, it is now