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Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry

Published

Author(s)

P Chi, David S. Simons, Peter Roitman
Citation
Surface and Interface Analysis
Volume
17

Citation

Chi, P. , Simons, D. and Roitman, P. (1991), Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry, Surface and Interface Analysis (Accessed March 1, 2024)
Created December 30, 1991, Updated October 12, 2021