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Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry
Published
Author(s)
P Chi, David S. Simons, Peter Roitman
Citation
Surface and Interface Analysis
Volume
17
Pub Type
Journals
Citation
Chi, P.
, Simons, D.
and Roitman, P.
(1991),
Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry, Surface and Interface Analysis
(Accessed June 7, 2023)