TY  - JOUR
AU  - P Chi
AU  - David Simons
AU  - Peter Roitman
C2  - Surface and Interface Analysis
DA  - 1991-12-31 00:12:00
LA  - en
M1  - 17
PB  - Surface and Interface Analysis
PY  - 1991
TI  - Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry
ER  -