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Quantitative Depth Profiling of Aluminum-Implanted SIMOX by Use of Secondary Ion Mass Spectrometry

Published

Author(s)

P Chi, David S. Simons, Peter Roitman, H. L. Hughes
Citation
Microbeam Analysis-1991
Publisher Info
,

Citation

Chi, P. , Simons, D. , Roitman, P. and Hughes, H. (1991), Quantitative Depth Profiling of Aluminum-Implanted SIMOX by Use of Secondary Ion Mass Spectrometry, , (Accessed July 25, 2024)

Issues

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Created December 30, 1991, Updated October 12, 2021