Chi, P.
, Simons, D.
, Roitman, P.
and Hughes, H.
(1991),
Quantitative Depth Profiling of Aluminum-Implanted SIMOX by Use of Secondary Ion Mass Spectrometry, ,
(Accessed May 7, 2025)
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Quantitative Depth Profiling of Aluminum-Implanted SIMOX by Use of Secondary Ion Mass Spectrometry
Published
Author(s)
, , , H. L. Hughes
Citation
Microbeam Analysis-1991
Publisher Info
,
Pub Type
Books
Citation
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Created December 30, 1991, Updated October 12, 2021