@book{765976,
  author = {P Chi and David Simons and Peter Roitman and H. Hughes},
  title = {Quantitative Depth Profiling of Aluminum-Implanted SIMOX by Use of Secondary Ion Mass Spectrometry},
  year = {1991},
  month = {1991-12-31 00:12:00},
  publisher = {, },
  language = {en},
}