TY  - SER
AU  - P Chi
AU  - David Simons
AU  - Peter Roitman
AU  - H. Hughes
C2  - , 
DA  - 1991-12-31 00:12:00
LA  - en
PB  - , 
PY  - 1991
TI  - Quantitative Depth Profiling of Aluminum-Implanted SIMOX by Use of Secondary Ion Mass Spectrometry
ER  -