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The Effect of Dose Rate on Interstitial Release from the End-of-Range Implant Damage Region in Silicon

Published

Author(s)

L S. Robertson, A Lilak, M E. Law, K. S. Jones, P. S. Kringhoj, L M. Rubin, J Jackson, David S. Simons, P Chi
Citation
Applied Physics Letters
Volume
71

Citation

Robertson, L. , Lilak, A. , Law, M. , Jones, K. , Kringhoj, P. , Rubin, L. , Jackson, J. , Simons, D. and Chi, P. (1997), The Effect of Dose Rate on Interstitial Release from the End-of-Range Implant Damage Region in Silicon, Applied Physics Letters (Accessed April 19, 2024)
Created February 17, 1997, Updated October 12, 2021