@article{846856,
  author = {L Robertson and A Lilak and M Law and K. Jones and P. Kringhoj and L Rubin and J Jackson and David Simons and P Chi},
  title = {The Effect of Dose Rate on Interstitial Release from the End-of-Range Implant Damage Region in Silicon},
  year = {1997},
  number = {71},
  month = {1997-02-18 00:02:00},
  publisher = {Applied Physics Letters},
  language = {en},
}