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Artifacts Observed in Oxygen Profiles of SIMOX Samples by Secondary Ion Mass Spectrometry

Published

Author(s)

P Chi, David S. Simons, Peter Roitman
Proceedings Title
Microbeam Analysis - l988, Proc. 22nd Annual Conf. Materials Analysis Society
Conference Dates
August 8-2, 1988
Conference Location
Milwaukee, WI, USA

Citation

Chi, P. , Simons, D. and Roitman, P. (1988), Artifacts Observed in Oxygen Profiles of SIMOX Samples by Secondary Ion Mass Spectrometry, Microbeam Analysis - l988, Proc. 22nd Annual Conf. Materials Analysis Society, Milwaukee, WI, USA (Accessed May 18, 2024)

Issues

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Created December 30, 1988, Updated October 12, 2021