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Round-Robin Study of Implants in Si and SiO2 by SIMS, RBS, and NAA

Published

Author(s)

Peter Roitman, David S. Simons, P Chi, Richard M. Lindstrom, G. E. Lux, S. Baumann, S. W. Novak, R. G. Wilson, D. Farrington, J. Keenan, F. A. Stevie, J. L. Moore, R. B. Irwin, A. J. Filo, C. W. Magee, R. Alcorn, D. File
Proceedings Title
Proc., Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
Conference Dates
September 3-8, 1989
Conference Location
Monterey, CA, USA

Citation

Roitman, P. , Simons, D. , Chi, P. , Lindstrom, R. , Lux, G. , Baumann, S. , Novak, S. , Wilson, R. , Farrington, D. , Keenan, J. , Stevie, F. , Moore, J. , Irwin, R. , Filo, A. , Magee, C. , Alcorn, R. and File, D. (1990), Round-Robin Study of Implants in Si and SiO<sub>2</sub> by SIMS, RBS, and NAA, Proc., Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII), Monterey, CA, USA (Accessed May 25, 2024)

Issues

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Created December 30, 1990, Updated October 12, 2021