Roitman, P.
, Simons, D.
, Chi, P.
, Lindstrom, R.
, Lux, G.
, Baumann, S.
, Novak, S.
, Wilson, R.
, Farrington, D.
, Keenan, J.
, Stevie, F.
, Moore, J.
, Irwin, R.
, Filo, A.
, Magee, C.
, Alcorn, R.
and File, D.
(1990),
Round-Robin Study of Implants in Si and SiO<sub>2</sub> by SIMS, RBS, and NAA, Proc., Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII), Monterey, CA, USA
(Accessed September 20, 2024)
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Round-Robin Study of Implants in Si and SiO2 by SIMS, RBS, and NAA
Published
Author(s)
, , , , G. E. Lux, S. Baumann, S. W. Novak, R. G. Wilson, D. Farrington, J. Keenan, F. A. Stevie, J. L. Moore, R. B. Irwin, A. J. Filo, C. W. Magee, R. Alcorn, D. File
Proceedings Title
Proc., Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
Conference Dates
September 3-8, 1989
Conference Location
Monterey, CA, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1990, Updated October 12, 2021