@conference{766386, author = {Peter Roitman and David Simons and P Chi and Richard Lindstrom and G. Lux and S. Baumann and S. Novak and R. Wilson and D. Farrington and J. Keenan and F. Stevie and J. Moore and R. Irwin and A. Filo and C. Magee and R. Alcorn and D. File}, title = {Round-Robin Study of Implants in Si and SiO2 by SIMS, RBS, and NAA}, year = {1990}, month = {1990-12-31 00:12:00}, publisher = {Proc., Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII), Monterey, CA, USA}, language = {en}, }