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Repeatability of Si Concentration Measurements in Si-Doped GaN Films

Published

Author(s)

P Chi, David S. Simons, A E. Wickenden, D D. Koleske
Citation
Journal of Vacuum Science and Technology A
Volume
15

Citation

Chi, P. , Simons, D. , Wickenden, A. and Koleske, D. (1997), Repeatability of Si Concentration Measurements in Si-Doped GaN Films, Journal of Vacuum Science and Technology A (Accessed July 23, 2024)

Issues

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Created February 10, 1997, Updated February 19, 2017