Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Repeatability of Si Concentration Measurements in Si-Doped GaN Films

Published

Author(s)

P Chi, David S. Simons, A E. Wickenden, D D. Koleske
Citation
Journal of Vacuum Science and Technology A
Volume
15

Citation

Chi, P. , Simons, D. , Wickenden, A. and Koleske, D. (1997), Repeatability of Si Concentration Measurements in Si-Doped GaN Films, Journal of Vacuum Science and Technology A (Accessed December 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 10, 1997, Updated February 19, 2017