Chi, P.
, Simons, D.
, Wickenden, A.
and Koleske, D.
(1997),
Repeatability of Si Concentration Measurements in Si-Doped GaN Films, Journal of Vacuum Science and Technology A
(Accessed April 30, 2025)
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Repeatability of Si Concentration Measurements in Si-Doped GaN Films
Published
Author(s)
, , A E. Wickenden, D D. Koleske
Citation
Journal of Vacuum Science and Technology A
Volume
15
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 10, 1997, Updated February 19, 2017