@article{109196,
  author = {P Chi and David Simons and A Wickenden and D Koleske},
  title = {Repeatability of Si Concentration Measurements in Si-Doped GaN Films},
  year = {1997},
  number = {15},
  month = {1997-02-10},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}