TY - JOUR AU - P Chi AU - David Simons AU - A Wickenden AU - D Koleske C2 - Journal of Vacuum Science and Technology A DA - 1997-02-10 LA - en M1 - 15 PB - Journal of Vacuum Science and Technology A PY - 1997 TI - Repeatability of Si Concentration Measurements in Si-Doped GaN Films ER -