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Effect of Ge on the Segregation of B in Si(100) and Si(110)

Published

Author(s)

P E. Thompson, C Silvestre, G Jernigan, K D. Hobart, David S. Simons, M Gregg
Citation
Journal of Applied Physics
Volume
81

Citation

Thompson, P. , Silvestre, C. , Jernigan, G. , Hobart, K. , Simons, D. and Gregg, M. (1997), Effect of Ge on the Segregation of B in Si(100) and Si(110), Journal of Applied Physics (Accessed May 22, 2024)

Issues

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Created November 30, 1997, Updated October 12, 2021