Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Evidence From SIMS of Doubly-Charged Boron Contamination During Singly-Charged Ion Implantation

Published

Author(s)

David S. Simons, P Chi, Donald B. Novotny
Proceedings Title
Proc., 12th International Congress for Electron Microscopy
Conference Location
Seattle, WA, USA

Citation

Simons, D. , Chi, P. and Novotny, D. (1991), Evidence From SIMS of Doubly-Charged Boron Contamination During Singly-Charged Ion Implantation, Proc., 12th International Congress for Electron Microscopy, Seattle, WA, USA (Accessed April 23, 2024)
Created December 30, 1991, Updated October 12, 2021