@conference{765681,
  author = {David Simons and P Chi and Donald Novotny},
  title = {Evidence From SIMS of Doubly-Charged Boron Contamination During Singly-Charged Ion Implantation},
  year = {1991},
  month = {1991-12-31 00:12:00},
  publisher = {Proc.,  12th International Congress for Electron Microscopy, Seattle, WA, USA},
  language = {en},
}