Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.


The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

The Development of Standard Reference Material 2137 - A Boron Implant in Silicon Standard for Secondary Ion Mass Spectrometry



David S. Simons, P Chi, Robert G. Downing, George P. Lamaze
Semiconductor Characterization Present Status and Future Needs
Publisher Info
AIP Press, Woodbury, NY
Created December 1, 1995, Updated February 19, 2017