The Development of Standard Reference Material 2137 - A Boron Implant in Silicon Standard for Secondary Ion Mass Spectrometry

Published: December 01, 1995

Author(s)

David S. Simons, P Chi, Robert G. Downing, George P. Lamaze
Citation: Semiconductor Characterization Present Status and Future Needs
Publisher Info: AIP Press, Woodbury, NY
Pub Type: Books
Created December 01, 1995, Updated February 19, 2017