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The Development of Standard Reference Material 2137 - A Boron Implant in Silicon Standard for Secondary Ion Mass Spectrometry

Published

Author(s)

David S. Simons, P Chi, Robert G. Downing, George P. Lamaze
Citation
Semiconductor Characterization Present Status and Future Needs
Publisher Info
AIP Press, Woodbury, NY
Created December 1, 1995, Updated February 19, 2017