Campisi, G.
, Roitman, P.
, Simons, D.
and Krull, W.
(1991),
A SIMS Study of the Deuterium Distribution in SIMOX Buried Oxides, Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA
(Accessed April 23, 2024)
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A SIMS Study of the Deuterium Distribution in SIMOX Buried Oxides, Extended Abstract
Published
Author(s)
G. J. Campisi, , , W. A. Krull
Proceedings Title
Proc., 1991 IEEE International SOI Conference
Conference Dates
October 1-3, 1991
Conference Location
Vail Valley, CO, USA
Pub Type
Conferences
Citation
Created December 30, 1991, Updated October 12, 2021