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A SIMS Study of the Deuterium Distribution in SIMOX Buried Oxides, Extended Abstract

Published

Author(s)

G. J. Campisi, Peter Roitman, David S. Simons, W. A. Krull
Proceedings Title
Proc., 1991 IEEE International SOI Conference
Conference Dates
October 1-3, 1991
Conference Location
Vail Valley, CO, USA

Citation

Campisi, G. , Roitman, P. , Simons, D. and Krull, W. (1991), A SIMS Study of the Deuterium Distribution in SIMOX Buried Oxides, Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA (Accessed March 1, 2024)
Created December 30, 1991, Updated October 12, 2021