@conference{758736,
  author = {G. Campisi and Peter Roitman and David Simons and W. Krull},
  title = {A SIMS Study of the Deuterium Distribution in SIMOX Buried Oxides, Extended Abstract},
  year = {1991},
  month = {1991-12-31 00:12:00},
  publisher = {Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA},
  language = {en},
}