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Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing

Published

Author(s)

Peter Roitman, Santos D. Mayo, David S. Simons, S. J. Krause, J Park, J. H. Lee, D. Venables, Patrick M. Lenahan, J. F. Conley
Proceedings Title
Proc., Electrochemical Society International Symposium on SOI Technology and Devices
Conference Dates
May 22-27, 1994
Conference Location
San Francisco, CA, USA

Citation

Roitman, P. , Mayo, S. , Simons, D. , Krause, S. , Park, J. , Lee, J. , Venables, D. , Lenahan, P. and Conley, J. (1994), Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing, Proc., Electrochemical Society International Symposium on SOI Technology and Devices, San Francisco, CA, USA (Accessed April 16, 2024)
Created December 30, 1994, Updated October 12, 2021