@conference{766381,
  author = {Peter Roitman and Santos Mayo and David Simons and S. Krause and J Park and J. Lee and D. Venables and Patrick Lenahan and J. Conley},
  title = {Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Proc., Electrochemical Society International Symposium on SOI Technology and Devices, San Francisco, CA, USA},
  language = {en},
}