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Quantitative Nanostructure Characterization Group

The projects within the group are highly interconnected to cover metrology and standards development as well as pursue novel device concepts, particularly for wide band gap semiconductors, magnetic nanomaterials and 2D materials. We maintain active collaborations with other groups at NIST and academic and industrial groups around the world.

Nanostructures are a critical component of innovations in high performance computing, electronics, energy conservation, renewable energy, biomedical research, and health care. We develop and demonstrate metrology techniques to address nanoscale measurement challenges. These techniques include scanning microwave microscopy, atom probe tomography, transmission electron microscopy, Raman spectroscopy, and time-resolved photoluminescence. Our goal is to push these methods beyond comparative measurements by evaluating absolute uncertainties with cross-method comparisons and calibration techniques that reveal systematic errors. We synthesize semiconductor nanostructures to serve both as test structures for measurement techniques and as building blocks for novel metrology tools and semiconductor devices.

News and Updates

Projects and Programs

Extreme Atom Probe Tomography

NIST is engaged in a joint effort between the Material Measurement Laboratory (MML) and the Physical Measurement Laboratory (PML) aimed at revolutionizing 3D

GaN Nanowire Growth

GaN nanowires grown by catalyst-free molecular beam epitaxy have the unique property that most nanowires are completely free of crystalline defects. This


The core activities in this program are the development and application of metrology for quantitative characterization of hetero-structured materials and


Tools and Instruments

Molecular Beam Epitaxy (MBE) Facility

The Applied Physics Division utilizes a fully automated, dual-chamber molecular beam epitaxy (MBE) system for the growth of advanced, compound semiconductor


Press Coverage



Group Leader and Project Leader Nanostructure Synthesis

Project Leaders (Quantitative Imaging, Atomic Scale Characterization, Nanoelectromagnetics)