Field evaporates (with a voltage and laser pulse) a sharp tip-shaped specimen. Collects the ionization products in a position-sensitive, time-of-flight mass spectrometer
Can determine the atomic species with ppm sensitivity and position from within the original analysis volume with sub-nm accuracy
Manufacturer/Model: Cameca LEAP 4000x Si
Laser-assisted atom probe tomography of weld region showing high-carbon interlath material with an isoconcentration surface of nominally 0.8 at. % embedded in martensite steel.
Paul Blanchard and Ann Chiaramonti Debay
Laser-assisted atom probe tomography of InGaN quantum wells in a GaN nanowire grown by molecular beam epitaxy. Reconstruction with an isoconcentration surface of nominally 0.8 at. % indium is shown.
Aledia, Colorado School of Mines, University of New Mexico, Lawrence Berkeley National Laboratory, NIST: Quantum Processing Group (687.07), Quantitative Nanostructure Characterization Group (686.09), Nanoscale Reliability Group (647.05)