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Probe corrected 200kV analytic electron microscope Resolves single atoms Chemical analytic capability (EELS, EDS) Highest resolution in electron optics (<0.1 nm
Dual beam focused ion beam/scanning electron microscope (FESEM). Focused ion beam using Ga atoms allows the patterning of objects at ~10 nm level (milling and
Field evaporates (with a voltage and laser pulse) a sharp tip-shaped specimen. Collects the ionization products in a position-sensitive, time-of-flight mass
The Applied Physics Division utilizes a fully automated, dual-chamber molecular beam epitaxy (MBE) system for the growth of advanced, compound semiconductor