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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Argon

ARGON

M.W. [1]

39.948

N.B.P [2]

87.28 K

T.P [2]

83.78K

Pc [2]

4.898 MPa

Tc [2]

150.86 K

Vc [2]

0.07459 m³/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T K	$$ \frac{C_P^0(T)} {R} $$	Vapor Pressure kPa	B(T) cm³· mol^-1	dB/dT·T cm³· mol^-1	C(T) cm⁶· mol^-2	dC/dT·T cm⁶· mol^-2	λ mW/ (m·K)	η µPa·s
Estimated Uncertainty	-	-	5%	-	10%	-	3%	3%
Reference	-	-	3	3	3	3	3	3
100	2.5	-	-181.99	334.7	-972.1	30165	6.4	8.2
110	2.5	-	-152.82	279.5	1015.8	13432	7.0	9.0
120	2.5	-	-130.32	238.9	1804.8	5534	7.6	9.7
130	2.5	-	-112.47	208.0	2076.3	1643	8.2	10.5
140	2.5	-	-97.98	183.7	2118.4	-307	8.8	11.3
150	2.5	-	-85.99	164.2	2060.4	-1271	9.5	12.1
160	2.5	-	-75.92	148.3	1962.1	-1719	10.1	12.9
170	2.5	-	-67.34	135.0	1851.7	-1891	10.7	13.7
180	2.5	-	-59.95	123.7	1742.4	-1914	11.3	14.4
190	2.5	-	-53.53	114.1	1640.2	-1858	11.9	15.2
200	2.5	-	-47.89	105.8	1547.2	-1763	12.4	15.9
210	2.5	-	-42.91	98.6	1463.9	-1651	13.0	16.7
220	2.5	-	-38.47	92.2	1389.8	-1533	13.6	17.4
230	2.5	-	-34.50	86.5	1324.2	-1417	14.1	18.1
240	2.5	-	-30.93	81.5	1266.3	-1307	14.7	18.8
250	2.5	-	-27.69	76.9	1215.1	-1203	15.2	19.5
260	2.5	-	-24.76	72.9	1169.7	-1108	15.7	20.2
270	2.5	-	-22.08	69.2	1129.6	-1020	16.3	20.8
280	2.5	-	-19.63	65.8	1094.0	-941	16.8	21.5
290	2.5	-	-17.37	62.7	1062.2	-868	17.3	22.1
300	2.5	-	-15.30	59.9	1033.9	-802	17.8	22.8
310	2.5	-	-13.38	57.2	1008.6	-743	18.3	23.4
320	2.5	-	-11.60	54.8	985.9	-689	18.8	24.0
330	2.5	-	-9.944	52.6	965.5	-640	19.3	24.7
340	2.5	-	-8.406	50.5	947.1	-595	19.7	25.3
350	2.5	-	-6.970	48.6	930.4	-555	20.2	25.9
360	2.5	-	-5.627	46.8	915.3	-519	20.7	26.5
370	2.5	-	-4.369	45.1	901.5	-485	21.1	27.0
380	2.5	-	-3.188	43.5	889.0	-455	21.6	27.6
390	2.5	-	-2.078	42.0	877.5	-428	22.0	28.2
400	2.5	-	-1.033	40.6	867.0	-403	22.5	28.8
410	2.5	-	-0.048	39.3	857.3	-380	22.9	29.3
420	2.5	-	0.883	38.0	848.4	-359	23.4	29.9
430	2.5	-	1.763	36.8	840.2	-341	23.8	30.4
440	2.5	-	2.596	35.7	832.6	-323	24.2	31.0
450	2.5	-	3.386	34.6	825.5	-308	24.6	31.5
460	2.5	-	4.136	33.6	818.9	-293	25.1	32.0
470	2.5	-	4.848	32.6	812.7	-280	25.5	32.6
480	2.5	-	5.526	31.7	807.0	-268	25.9	33.1
490	2.5	-	6.171	30.8	801.6	-257	26.3	33.6
500	2.5	-	6.785	30.0	796.5	-247	26.7	34.1
550	2.5	-	9.466	26.3	774.9	-207	28.7	36.6
600	2.5	-	11.623	23.3	758.1	-182	30.5	39.0
650	2.5	-	13.388	20.8	744.3	-165	32.4	41.3
700	2.5	-	14.851	18.7	732.5	-154	34.1	43.6
750	2.5	-	16.078	16.9	722.0	-148	35.8	45.7
800	2.5	-	17.117	15.3	712.6	-144	37.5	47.9
850	2.5	-	18.005	14.0	703.9	-142	39.1	49.9
900	2.5	-	18.768	12.8	695.8	-142	40.7	51.9
950	2.5	-	19.428	11.7	688.1	-142	42.2	53.9
1000	2.5	-	20.003	10.7	680.8	-144	43.8	55.8

References:

IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
IUPAC, "International Thermodynamic Tables of the Fluid State - Argon," Butterworths, London (1972).
Aziz, R.A., "A Highly Accurate Interatomic Potential for Argon," J. Chem. Phys. (1993, 99, 4518).

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.