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Displaying 5701 - 5725 of 13218

Comparison of Electron Density Measurements in Planar Inductively Coupled Plasmas by Means of the Plasma Oscillation Method and Lanqmuir Probes

January 1, 1998
Author(s)
A Schwabedissen, Eric C. Benck, J R. Roberts
… The absolute, spatially resolved electron densities in planar inductively coupled plasmas have been measured by … the plasma oscillation method and Langmuir probes. In the plasma oscillation method a weak electron beam … RF Reference Cell . The results for both methods in electropositive, pure rare gas and molecular gas …

Application of Trasmission Electron Detection to Scalpel Mask Metrology

November 1, 1997
Author(s)
R Farrow, Michael T. Postek, William J. Keery, Samuel N. Jones, J R. Lowney, M Blakey, L Fetter, A Liddle, L C. Hopkins, H A. Huggins, M Peabody, A Novembre, J Griffith
… were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam … lithography mask using the transmitted electron signal in a modified scanning electron microscope. Features as small … measurement accuracy is mostly limited by the variations in the material and not the measurement system. It is …

Self-Assembled Monolayers Exposed by Metastable Argon and Metastable Helium for Neutral Atom Lithography and Atomic Beam Imaging

September 1, 1997
Author(s)
A Bard, K K. Berggren, J L. Wilbur, John D. Gillaspy, S L. Rolston, Jabez J. McClelland, William D. Phillips, M Prentiss, G M. Whitesides
… We used a beam of noble gas atoms in a metastable excited state to expose a thin (1.5nm … of dose of metastable atoms by processing the samples in a wet-chemical etch to remove the gold from unprotected … Journal of Vacuum Science and Technology B …
Displaying 5701 - 5725 of 13218
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