Mcmillin, B.
and Zachariah, M.
(1997),
Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell, Journal of Vacuum Science and Technology A
(Accessed October 10, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell
Published
Author(s)
B K. Mcmillin,
Citation
Journal of Vacuum Science and Technology A
Volume
15
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 30, 1997, Updated October 12, 2021