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Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell

Published

Author(s)

B K. Mcmillin, Michael R. Zachariah
Citation
Journal of Vacuum Science and Technology A
Volume
15

Citation

Mcmillin, B. and Zachariah, M. (1997), Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell, Journal of Vacuum Science and Technology A (Accessed June 15, 2024)

Issues

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Created November 30, 1997, Updated October 12, 2021