Mcmillin, B.
and Zachariah, M.
(1997),
Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell, Journal of Vacuum Science and Technology A
(Accessed April 19, 2024)
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Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell
Published
Author(s)
B K. Mcmillin,
Citation
Journal of Vacuum Science and Technology A
Volume
15
Pub Type
Journals
Citation
Created November 30, 1997, Updated October 12, 2021