TY  - JOUR
AU  - B Mcmillin
AU  - Michael Zachariah
C2  - Journal of Vacuum Science and Technology A
DA  - 1997-12-01 00:12:00
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology A
PY  - 1997
TI  - Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell
ER  -