@article{845311,
  author = {B Mcmillin and Michael Zachariah},
  title = {Two-Dimensional Imaging of CF2Density by Laser-Induced Fluorescence in CF4 Etching Plasmas in the Gaseous Electronics Conference Reference Cell},
  year = {1997},
  number = {15},
  month = {1997-12-01 00:12:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}