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Laser single-photon mass spectrometry measurements of SiCl and SiCl2 during thermal etching of Si(100)

Published

Author(s)

N Materer, R S. Goodman, S R. Leone
Citation
Journal of Vacuum Science and Technology A
Volume
15

Citation

Materer, N. , Goodman, R. and Leone, S. (1997), Laser single-photon mass spectrometry measurements of SiCl and SiCl2 during thermal etching of Si(100), Journal of Vacuum Science and Technology A (Accessed April 16, 2024)
Created December 31, 1996, Updated October 12, 2021