TY  - JOUR
AU  - N Materer
AU  - R Goodman
AU  - S Leone
C2  - Journal of Vacuum Science and Technology A
DA  - 1997-01-01 00:01:00
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology A
PY  - 1997
TI  - Laser single-photon mass spectrometry measurements of SiCl and SiCl2 during thermal etching of Si(100)
ER  -